Structural, chemical, and luminescence properties of Pr 3+-doped HfSiO x layers fabricated by radiofrequency magnetron sputtering were examined as a function of annealing temperature. Phase separation between SiO 2 and HfO 2 as well as the location of Pr 3+ dopants were investigated using atom probe tomography and transmission electron microscopy while optical properties of Pr 3+ ions were studied using photoluminescence measurements. As a result, (i) we evidenced the location of the Pr 3+ dopants in the HfO 2 phase while the SiO 2 phase was discovered to be free of these dopants, (ii) the HfO 2 phase was identified to crystallize in the cubic phase until 1050°C annealing, (iii) no Pr clusters were detected as function of annealing, and (iv) luminescence properties were discussed in regard to the location of Pr in the HfO 2 cubic phase.