“…Process issues associated with low-k dielectrics can have significant impact on electromigration performance. Impact of Spin-on-glass™ (SOG) IMD process was reported, in which outgas of SOG at via was found to produce void and correspondingly degradation in electromigration performance [79].…”
Section: Degradation In Electromigration Performance Due To Low-k Diementioning
“…Process issues associated with low-k dielectrics can have significant impact on electromigration performance. Impact of Spin-on-glass™ (SOG) IMD process was reported, in which outgas of SOG at via was found to produce void and correspondingly degradation in electromigration performance [79].…”
Section: Degradation In Electromigration Performance Due To Low-k Diementioning
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