Impact of Geometry on the Performance of Cantilever-Based Piezoelectric Vibration Energy Harvesters

Alameh, Abdul Hafiz; Gratuze, Mathieu; Nabki, Frédéric

doi:10.1109/jsen.2019.2932341

Cited by 23 publications

(8 citation statements)

References 26 publications

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“…The MEMS resonators have been fabricated using the commercial PiezoMUMPs process from MEMSCAP (Crolles, France). This process is a piezoelectric-based MEMS process that has been used in the literature to create MEMS resonators, energy harvesters, sensors, and ultrasonic transducers [6], [14], [39][40][41][42]. The anchoring of these nonlinear MEMS resonators has been chosen so that one of the resonators exhibits a softening type response and the other one a hardening type response.…”

Section: A Design and Fabricationmentioning

confidence: 99%

A Nonlinear Pulse Shaping Method Using Resonant Piezoelectric MEMS Devices

Gratuze¹,

Alameh²,

Robichaud

et al. 2022

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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In this paper, a methodology for increasing the displacement of the membrane in nonlinear transducers is presented. This methodology that relies on pulse shaping is based on the frequency modulation of the excitation signal which in turn results in an amplitude modulation of the displacement of the resonator. The benefits of pulse shaping include the increase of the displacement of the membrane of the resonator, the ability to leverage two mechanisms to dynamically tune the resonant frequency of the device and a relative control of the decay time of the resonator. These properties have been verified using simulations and experimental results. The experimental results are performed using two nonlinear resonators with a frequency of 3.9 kHz and 7.9 kHz. With a constant amplitude of the excitation voltage, experimental results show that the use of pulse shaping allows a velocity increase of the membrane of a piezoelectric MEMS resonator of up to 191% for a softening type resonator, and 348% for a hardening type resonator. The frequency tuning mechanism allowed the operation of the softening type resonator and of the hardening type resonator over a bandwidth of 280 Hz and 115 Hz, respectively, while providing higher velocity than with the non-optimized excitation signal. The resulting pulse shaping methodology can be applied to other nonlinear resonators as shown using simulation and experimental results. Therefore, this work should lead to an increase of the use of nonlinear resonators for various applications.

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Section: A Design and Fabricationmentioning

confidence: 99%

A Nonlinear Pulse Shaping Method Using Resonant Piezoelectric MEMS Devices

Gratuze¹,

Alameh²,

Robichaud

et al. 2022

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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“…This process provides cost-effective access to piezoelectric MEMS prototyping. In the literature, this process has been reported for the implementation of various MEMS-based resonators and VEH (e.g., [ 7 , 27 , 34 , 35 , 36 , 37 ]). The fabrication process includes five masks based on an N-type, double-sided, polished silicon-on-insulator (SOI) wafer.…”

Section: Design and Micro-fabrication Processmentioning

confidence: 99%

Control of Spring Softening and Hardening in the Squared Daisy

et al. 2021

Self Cite

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Nonlinear, mechanical microelectromechanical system (MEMS) resonating structures exhibit large displacement and a relatively broad operating bandwidth. These unique features make them particularly of interest for the development of MEMS actuators and sensors. In this work, a mechanical MEMS structure allowing the designer to determine the type of nonlinearity, that is, softening or hardening, based on its anchor scheme is presented. Effects of the excitation signal on the behavior of the proposed MEMS in the frequency domain are investigated. In this regard, a comprehensive experimental comparison among the nonlinear behaviors of softening and hardening has been conducted. To reduce the hysteresis effect to a minimum, an excitation approach, which is a pulsed sweep in frequency with a discrete resolution, is presented. The maximal velocity, quality factor, bandwidth, and resonant frequency of these two types of nonlinear MEMS resonators are compared under three different types of excitation. Finally, it is shown that the performance and characteristics extracted from nonlinear mechanical MEMS resonating structures are highly dependent on the excitation method. Hence, in the present case, the apparent performances of the MEMS resonator can increase by up to 150% or decrease by up to 21%, depending on the excitation approaches. This implies the necessity of a standardized testing methodology for nonlinear MEMS resonators for given end applications.

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“…where ( ) (10) As shown in Figure 2, the characterized of a cantilever beam is that one end is clamped, the other end is free. The boundary conditions are shown in Equation (11)…”

Section: Static Theoretical Modelmentioning

confidence: 99%

“…To predicate the beams mechanical properties accurately, some researchers use the business software [10][11]. For example, Al-Qasem et al [12] calculated the shear stress in a cantilever beam by ANSYS software.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Properties Analysis of Bilayer Euler-Bernoulli Beams Based on Elasticity Theory

Zhang

2020

IJE

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This paper analyzes the effects of structures and loads on the static bending and free vibration problems of bilayer beams. Based on static mechanical equilibrium and energy equilibrium, the static and dynamic governing equations of bilayer beam are established. It is found that the value of the thickness ratio has a significant effect on the static and dynamic responses of the beam, and the structure factors have their own critical value. When the value of the relative thickness is lower than its critical value or the length thickness ratio is greater than its critical value, the static and dynamic responses of the beam increase obviously. The results reveal that a critical value exists in bilayer beam, the value has noticeable influence on the mechanical properties of bilayer beams. Therefore, investigators should predict the critical structures accurately, when they design the bilayer beam.

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Impact of Geometry on the Performance of Cantilever-Based Piezoelectric Vibration Energy Harvesters

Cited by 23 publications

References 26 publications

A Nonlinear Pulse Shaping Method Using Resonant Piezoelectric MEMS Devices

A Nonlinear Pulse Shaping Method Using Resonant Piezoelectric MEMS Devices

Control of Spring Softening and Hardening in the Squared Daisy

Mechanical Properties Analysis of Bilayer Euler-Bernoulli Beams Based on Elasticity Theory

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