Impact of dose and energy of argon (40Ar+) and fluorine (19F+) ion implantation on uniformity of silicon oxidation

Oxidation Behavior of C- and Au-Ion-Implanted Biodegradable Polymers

“…Generally, polymers are hydrophobic, and conversion of these polymers from hydrophobic to hydrophilic behavior usually improves the adhesion strength, biocompatibility, and other important properties in physiological conditions and has been directly linked to oxygenation of the surface. In general, increase of carboxyl and C-O-C groups affects the surface energy and tends to improve surface wettability [25]- [28]. Fig.…”

“…This might be the origin of the associated changes in surface reactions and surface energy in terms of surface charge distribution. It has been reported [28] that the oxidation rate of ionimplanted silicon increases with fluence of Ar + and F + ions, whereas the implantation energy and, hence, the penetration depth do not have much effect on the silicon oxidation rate, and that the thickness uniformity of the oxide film grown over the surface also improves with increasing implantation fluence. In the present study, the same situation is true for polymers but over a certain fluence range.…”

“…Defects generated by implantation surpass the existing defects on the film, and the oxidation process is dominated by implantationgenerated defects. In such a situation, nonuniformity of the implantation process governs the uniformity of oxidation [19], [21], [28]. The implanted surface also enhances the migration of oxidizing species in polymers, and multidimensional migration of the oxidizers overcomes the enhancement of oxidation sites [28].…”

“…Aromatic rings of these polymers interact with polar water molecules through π electrons. After both Au and C implantations, hydrogen bonding and dipole interactions between water molecules and oxygen functional groups on the surface result in improved wettability of all biodegradable polymers [19]- [28].…”