Impact of different polyimide-based substrates on the soft magnetic properties of NiFe thin films

Abstract

We investigated the impact of polymer substrates on the magnetic properties of soft magnetic thin films. Experiments were carried out to evaluate the performance of AMR (anisotropic magnetoresistive) sensors deposited on polymeric substrates and to give indications for the design of future sensors on flexible substrates. Sputtered permalloy (NiFe 81/19) was used as a soft magnetic thin film layer. As substrate materials, liquid polyimide precursors and DuPont Kapton® HN foil were examined. Surface roughness was determined for each substrate material. The dynamic of soft magnetic behavior of the permalloy thin films was observed in a homogenous alternating magnetic field. Resulting R-Hcurves were evaluated in regard to the magnitude of the magnetoresistive effect (∆R / R0-ratio), as well as the resulting magnetic anisotropy of the tested samples. B-H-curves were obtained by means of a vibrating sample magnetometer (VSM). Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, edited by José L. Sánchez-Rojas, Riccardo Brama, et. al., Proc. of SPIE Vol. 9517, 95171R · © 2015 SPIE CCC code: 0277-786X/15/$18 ·

Recent Developments of Magnetoresistive Sensors for Industrial Applications

“…Aforementioned stress transfer from flexible polymers into metallic layers is observed in this case as well and has been further investigated in [ 67 ]. It was found that stress induced in the substrate during the lamination of Kapton ® foil onto a carrier strongly influenced the direction of magnetization ( M ) of a NiFe layer and acts as bias force, as predicted by stress anisotropy.…”

Previsão da Rugosidade Global do Modelo de Deposição Balística Usando Redes Neurais

“…Uma das principais quantidades de interesse em processos de deposic ¸ão é a rugosidade, sendo que o controle desta possibilita a gerac ¸ão de filmes com maior qualidade de composic ¸ão, uniformidade e microestrutura [10,11,12], acarretando em diferentes propriedades como adesão [13], propriedades magnética [14], ópticas [15], entre outros. Na literatura, já existe uma variedade de trabalhos que empregam técnicas de aprendizado de máquina para a previsão da rugosidade, no qual o principal foco destas é realizar uma análise de dados experimentais de rugosidade para diferentes tipos de compostos [16,17,18].…”

Thermoelastic-tunable magnetic response of BiFeO3thin film on colloidal photonic crystal substrate fabricated by pulsed laser deposition

“…There is a growing interest in the science and technology of polymer/multifunctional magnetic materials heterostructures . Recently, some of thin‐film heterostructures have been successfully fabricated using a flexible polymer matrix to influence the magnetic properties of deposited magnetic films .…”

“…This reversible thermal property of the polymer colloidal crystal in combination with the magnetic response of the multiferroic compounds can possibly lead to innovations in sensors and switches based on thermomagneto-optical coupling and facilitate the nanoscale thermal characterization. 1 Introduction There is a growing interest in the science and technology of polymer/multifunctional magnetic materials heterostructures [1][2][3]. Recently, some of thin-film heterostructures have been successfully fabricated using a flexible polymer matrix to influence the magnetic properties of deposited magnetic films [3][4][5][6].…”