2015
DOI: 10.1007/s10853-015-9493-z
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Impact of deposition conditions on the crystallization kinetics of amorphous GeTe films

Abstract: The speed at which phase change memory devices can operate depends strongly on the crystallization kinetics of the amorphous phase. To better understand factors that affect the crystallization rate, we have investigated crystallization of GeTe films as a function of their deposition temperatures and deposition rates, using X-ray synchrotron radiation and Raman spectroscopy. As-deposited films were found to be fully amorphous under all conditions, even though films deposited at higher temperatures and lower rat… Show more

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Cited by 35 publications
(11 citation statements)
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References 37 publications
(50 reference statements)
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“…A detailed description of the microdiffraction beamline is given elsewhere [14][15][16][17]. The efficacy of synchrotron X-ray diffraction in enabling technologically important innovations, including in microelectronics and nanotechnology industries, in additions to next generation silicon solar PV technologies, have recently been reported and described elsewhere [18][19][20][21][22] Figure 2a shows the schematic of the microdiffraction experiment setup and an actual picture of the setup is shown in Figure 2b. The sample was mounted on the stage with its back (Figure 1b) facing the X-ray beam, as X-rays cannot penetrate the front glass due to absorption.…”
Section: Case Study 1: Effect Of Encapsulation Polymer Modulus On Celmentioning
confidence: 99%
“…A detailed description of the microdiffraction beamline is given elsewhere [14][15][16][17]. The efficacy of synchrotron X-ray diffraction in enabling technologically important innovations, including in microelectronics and nanotechnology industries, in additions to next generation silicon solar PV technologies, have recently been reported and described elsewhere [18][19][20][21][22] Figure 2a shows the schematic of the microdiffraction experiment setup and an actual picture of the setup is shown in Figure 2b. The sample was mounted on the stage with its back (Figure 1b) facing the X-ray beam, as X-rays cannot penetrate the front glass due to absorption.…”
Section: Case Study 1: Effect Of Encapsulation Polymer Modulus On Celmentioning
confidence: 99%
“…Synchrotron Laue X-ray Microdiffraction (µSLXRD) is a type of X-ray Laue diffraction technique that has been used for a variety of applications for its non-destructive nature and suitability in examining the defect structure of sub-micron and nanometer scale specimens [4,7,[23][24][25][26][27][28][29][30]. The X-ray beam comes from a powerful synchrotron source, which can be focused into a submicron spot size, close to the grain size of most single crystalline materials.…”
Section: The Technique: Synchrotron Laue X-ray Microdiffractionmentioning
confidence: 99%
“…Thin lm photovoltaic (PV) cell, which is capable of effectively converting solar energy into electrical energy, is one of the most signicant subjects in semiconductor technologies. [1][2][3][4][5][6] The monolithic triple junction cells (GaInP/GaInAs/Ge) are preferred in many elds like aircras and space satellites 7,8 for their high efficiency up to 30% air mass zero (AM0). [9][10][11][12][13][14][15] However, the mechanical stress and fracture of the multilayer PV cells introduced during manufacture and its service process play crucial roles in light-electricity conversion performances and their lifespan.…”
Section: Introductionmentioning
confidence: 99%