2015
DOI: 10.1109/jphotov.2014.2359737
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Impact of Carrier Profile and Rear-Side Reflection on Photoluminescence Spectra in Planar Crystalline Silicon Wafers at Different Temperatures

Abstract: Abstract-The increasing use of spectral photoluminescence as an advanced and accurate diagnostic tool motivates a comprehensive assessment of the effects of some important optical and electrical properties on the photoluminescence spectra from crystalline silicon wafers. In this paper, we present both modeling results and measurements to elucidate the effects of the internal reflectance at the planar wafer surfaces, as well as the carrier profile varying across the sample thickness due to an increased rear-sur… Show more

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Cited by 15 publications
(9 citation statements)
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“…The spectra from the light and shallow profiles (samples 3 and 4) are closer to that of the undiffused sample, and thus the presence of their diffused layer is much more difficult to observe at room temperature. Note that this signature is opposite to the effects caused by non‐uniform excess carrier profile and surface reflectivity, in which the higher wavelength side of the normalized spectrum is not affected due to the very long absorption depth of photons in this wavelength region, whereas the low wavelength side is affected more significantly at higher temperatures .…”
Section: Results and Analysismentioning
confidence: 84%
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“…The spectra from the light and shallow profiles (samples 3 and 4) are closer to that of the undiffused sample, and thus the presence of their diffused layer is much more difficult to observe at room temperature. Note that this signature is opposite to the effects caused by non‐uniform excess carrier profile and surface reflectivity, in which the higher wavelength side of the normalized spectrum is not affected due to the very long absorption depth of photons in this wavelength region, whereas the low wavelength side is affected more significantly at higher temperatures .…”
Section: Results and Analysismentioning
confidence: 84%
“…Therefore, the dependence of the BB peak intensities on the excitation power is different for the two layers. Since the PL intensity ∼( N D + Δ n ) × Δ n where N D is the doping density and Δ n is the excess carrier density , the PL signal is expected to be approximately linearly proportional to Δ n in the diffused layer, but should be a quadratic function of Δ n in the silicon substrate. When the excitation power is increased, the PL signal of the diffused layer increases more slowly than that of the substrate, and thus the normalized diffused BB peak is less pronounced.…”
Section: Results and Analysismentioning
confidence: 99%
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“…At low temperatures, there is no photon reabsorption due to the very small values of the absorption coefficient in the wavelength range of interest . Thus, any change in the relative spectral shape reflects changes in electronic structures inside Si wafers.…”
Section: Background and Methods Descriptionmentioning
confidence: 99%
“…The stronger correlation with the sheet resistance than with the total dopant concentration stems from the fact that sheet resistance is a depth‐wise integration of the product of the doping density N A and the majority carrier mobility μ . Meanwhile, PL intensity is a depth‐wise integration of Δn × (Δn + N A ), in which the excess carrier density Δn is also related to the mobilities of both majority and minority carriers . Therefore, among the three parameters (surface doping density, total dopant concentration, and sheet resistance), the intensity ratio between 1140–1250 nm and 1120–1140 nm reflects most clearly the sheet resistance of the diffused layers.…”
Section: Quantification Of Sheet Resistance Using μ‐Plsmentioning
confidence: 99%