2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) 2018
DOI: 10.1109/icsict.2018.8565801
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Impact of BEOL Film Deposition on Poly-Si 3D NAND Device Characteristics

Yuexin Zhao
1
,
Jun Li2,
Xiaolong Hu3
et al.
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