Imaging of microcrack propagation in 3D nanostructures applying laboratory nano-XCT

Abstract

Laboratory X-ray microscopy and nano X-ray computed tomography (nano-XCT) have the unique capability to combine sub-100nm resolution and high object penetration. Therefore, these are appropriate non-destructive inspection techniques for the detection of flaws with a size of 100 nm and below in opaque objects and bulk materials. Another advantage of X-ray microscopy – as opposed to destructive failure analysis methods – is that kinetic processes such as microcrack evolution can be imaged. The unique combination of micromechanics and high-resolution 3D imaging allows to study degradation and failure mechanisms in opaque 3D nanopatterned structures, and it allows to provide essential information for fracture mechanics in small dimensions. The high-resolution in-situ/operando imaging of microcrack propagation in microelectronic products and in battery electrodes is demonstrated.