Imaging and spectrometry of a microscopic gaseous target by SEM and TEM

Abstract

Microscopic gas jets are experimentally investigated using a scanning electron microscope/electron microprobe (JXA 50A, JEOL, Tokyo) equipped with a transmitted electron detector, and the CEM 902 (Zeiss, Oberkochen) which allows electron spectroscopic imaging. Both capillary microjet devices and circular orifices have been used. Imaging of the microgas jet (argon, air, artificial gas mixtures) is done by transmitted electrons (dark field), electrons as collected by the conventional Everhart-Thornley secondary electron detector, and by electron spectroscopic imaging, both at the argon M-and L edges. Xray spectra and electron energy loss spectra taken at an axis point just a few micrometers downstream from the orifice are discussed.