Image registration for stability testing of MEMS

Abstract

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging, astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

Cryogenic photogrammetry and radiometry for the James Webb Space Telescope microshutters

“…All the dilations and translations of the mother wavelet form an orthonormal basis in which the function image is uniquely represented and therefore the transformation can be inverted to produce the original images from the unique representation. 19 The images are filtered in a multi-resolution process starting with low-accuracy, low-resolution features before iterating to high-frequency and highly accurate spatial features (a pyramidal approach). In this manner, low-pass features like cruciform structure provide rough registration before high-pass features like small shape edges provide the fine-accuracy registration.…”