III–V semiconductor material for tunable Fabry–Perot filters for coarse and dense WDM systems

Strassner, M.; Daleiden, J.; Chiţică, N.; Keiper, D.; Stålnacke, B.; Greek, Staffan; Hjort, Klas

doi:10.1016/s0924-4247(00)00396-4

Cited by 25 publications

(11 citation statements)

References 5 publications

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“…The third interferometric spectrometer is based on the Fabry–Pérot (FP) principle [ 4 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 , 57 ]. Although only two parallel transparent dielectric mirrors are involved, the FP interferometer is also highly complex and involves multipath interference.…”

Section: Introductionmentioning

confidence: 99%

“…As a selection of alternatives to these mini grating spectrometers, we compare in this review paper four strongly miniaturized optical spectrometers ( Table 1 ): AWG devices [ 20 , 21 , 22 , 23 , 24 , 25 , 26 ], static FP filter arrays on a charge-coupled device (CCD) or complementary metal oxide semiconductor (CMOS) sensor arrays [ 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 ], tunable MEMS FP filter arrays [ 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 , 55 , 56 ] on photodetector (PD) arrays, and tunable MEMS photonic crystal (PC) filters [ 61 , 70 , 71 , 72 , 73 , 74 ]. At first glance, we identify that all these alternatives are smaller in size and reveal higher resolutions, as well as smaller FWHM than the grating spectrometers.…”

Section: Introductionmentioning

confidence: 99%

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Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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Optical spectrometers and sensors have gained enormous importance in metrology and information technology, frequently involving the question of size, resolution, sensitivity, spectral range, efficiency, reliability, and cost. Nanomaterials and nanotechnological fabrication technologies have huge potential to enable an optimization between these demands, which in some cases are counteracting each other. This paper focuses on the visible and near infrared spectral range and on five types of optical sensors (optical spectrometers): classical grating-based miniaturized spectrometers, arrayed waveguide grating devices, static Fabry–Pérot (FP) filter arrays on sensor arrays, tunable microelectromechanical systems (MEMS) FP filter arrays, and MEMS tunable photonic crystal filters. The comparison between this selection of concepts concentrates on (i) linewidth and resolution, (ii) required space for a selected spectral range, (iii) efficiency in using available light, and (iv) potential of nanoimprint for cost reduction and yield increase. The main part of this review deals with our own results in the field of static FP filter arrays and MEMS tunable FP filter arrays. In addition, technology for efficiency boosting to get more of the available light is demonstrated.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

et al. 2021

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“…In this manner, losses can be compensated on-chip without the need for separate optical amplifiers-a significant cost savings. Although InP-based MEMS have been previously demonstrated, most efforts have concentrated on vertical cavity tunable optical filters [6]- [12]. The tuning range for these optical filters is around 100 nm with similar actuation displacements.…”

mentioning

confidence: 99%

InP-based optical waveguide MEMS switches with evanescent coupling mechanism

Pruessner

Amarnath

Datta

et al. 2005

J. Microelectromech. Syst.

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An optical waveguide MEMS switch fabricated on an indium phosphide (InP) substrate for operation at 1550 nm wavelength is presented. Compared to other MEMS optical switches, which typically use relatively large mirrors or long end-coupled waveguides, our device uses a parallel switching mechanism. The device utilizes evanescent coupling between two closely-spaced waveguides fabricated side by side. Coupling is controlled by changing the gap and the coupling length between the two waveguides via electrostatic pull-in. This enables both optical switching and variable optical coupling at voltages below 10 V. Channel isolation as high as 47 dB and coupling efficiencies of up to 66% were obtained with switching losses of less than 0.5 dB. We also demonstrate voltage-controlled variable optical coupling over a 17.4 dB dynamic range. The devices are compact with 2 m 2 m core cross section and active area as small as 500 m 5 m. Due to the small travel range of the waveguides, fast operation is obtained with switching times as short as 4 s. Future devices can be scaled down to less than 1 m 1 m waveguide cross-sectional area and device length less than 100 m without significant change in device design.[1372]Index Terms-Directional coupler, indium phosphide (InP), integrated waveguides, optical MEMS switches.

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“…Adequate growth conditions, such as growth interruptions between layers and low AsH3 partial pressure, have been chosen to minimize the parasitic incorporation of arsenic atoms into the structural InP layers which may cause detrimental deformations of the released membranes [12]. Following the epitaxy, the backside of the wafer is optically polished.…”

Section: Fabrication Of the Devicementioning

confidence: 99%

Tunable InP/air MOEMS filter with record breaking selectivity

2006

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We describe the design and fabrication of novel Fabry-Pérot tunable filters based on a deformable structure composed of surface micromachined indium phosphide (InP) / Air Distributed Bragg Reflectors (DBRs). As compared to conventional designs, superior spectral selectivity has been achieved by displacing the resonant cavity into the high index material (InP) rather than in air. This configuration is expected to reduce significantly the lateral losses of the cavity. The filters feature also a novel doping structure for bi-directional electrostatic actuation. We present simulations and experimental results that demonstrate the effectiveness of this high index cavity concept for improving the selectivity of small dimension tunable MOEMS filters. The devices are fabricated using a multiple InP-air-gap MOEMS technology based on the sacrificial etching of an InP / InGaAs stack A spectral linewidth better than 0.15 nm over a tuning range of 40 nm is experimentally demonstrated. Design improvements for doubling the tuning range are also proposed.

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III–V semiconductor material for tunable Fabry–Perot filters for coarse and dense WDM systems

Cited by 25 publications

References 5 publications

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

Role of Nanoimprint Lithography for Strongly Miniaturized Optical Spectrometers

InP-based optical waveguide MEMS switches with evanescent coupling mechanism

Tunable InP/air MOEMS filter with record breaking selectivity

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