Identification of the normal and abnormal glow discharge modes in a neon-xenon gas mixture at low pressure

Hechelef, B; Bouchikhi, Abdelaziz

doi:10.1088/2058-6272/aac693

Cited by 9 publications

(3 citation statements)

References 27 publications

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“…The density of argon atoms n = 0.5 × 10 19 m -3 at the above pressure p = 0.02 Pa and room temperature [40][41][42]. Taking into account that the charge exchange cross-section of 5 keV argon ions amounts to σ c = 2 × 10 -19 m 2 [43] we may conclude that their charge exchange length λ c = 1/nσ c = 100 cm exceeds the grid sheath width d = 5-10 cm by an order of magnitude.…”

Section: Resultsmentioning

confidence: 99%

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

et al. 2018

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Y.A.M.); m.volosova@stankin.ru (M.A.V.)Abstract: A combined strengthening of cutting tools for finishing has been carried out in glow discharge plasma filling a process vacuum chamber. At the first stage, reamers rotating around the axis distanced from the magnetron targets at 8 cm were bombarded by fast argon atoms produced due to charge exchange collisions of ions accelerated in space charge sheathes between the plasma and a negatively biased to 3 kV grid with a 25 cm radius of its concave surface curvature. The reamer bombardment by fast neutral atoms led to a reduction of its cutting-edge radius from~7 µm to~2 µm. At the second stage, the reamer surface was nitrided within 1 h at a temperature of 500 • C stabilized by regulation of the negative bias voltage accelerating the nitrogen ions. At the third stage, a 3 µm thick TiN coating has been synthesized on the reamer bombarded by pulsed beams of 3 keV neutral atoms at a 50 Hz repetition rate of 50 µs wide pulses. After the combined strengthening, the cutting edge radius of the coated reamer amounted to~5 µm and the roughness of the area machined by the reamer holes in blanks made of structural steel reduced by about 1.5 times.

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Section: Resultsmentioning

confidence: 99%

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

et al. 2018

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“…Glow discharge plasma [1][2][3][4][5][6][7][8][9][10][11] produced by a powered DC or a RF source has various applications in industrial technologies and medical therapy. Among which, an improved discharge by the substance vapor deposition, a surface adaptation by different materials and the plasma etching.…”

Section: Introductionmentioning

confidence: 99%

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Bouchikhi¹

2022

Ukr. J. Phys.

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We study the neon dielectric barrier discharge with metastable atom density on a capacitively coupled radio frequency at a pressure of about 4–12 Torr. The transport parameters of neon are dependent on the electron energy, and their range is about 0.04–50 eV. A one-dimensional fluid model and the drift-diffusion theory are used to describe the neon dielectric barrier discharge. The effect of the gas pressure on the properties of neon dielectric barrier discharge is presented for the cycle-averaged regime. It is shown that the particle densities, electric potential, and metastable atom density increase with the pressure. In addition, the surface charge concentration and the gap voltage increase as well.

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“…The technology of the glow discharge [1][2][3][4][5][6][7] is an important domain in the microelectronic industry such as the etching or the deposition of thin solid films, and a spectroscopic analytical for metallic and sputtering treatments. This technology is carried out a lot in pure gas, and in mixture gases.…”

Section: Introductionmentioning

confidence: 99%

Current-Voltage Characteristics in a Helium-Argon Gas Mixture Glow Discharge at Low Pressure

Hechelef

Bouchikhi

2019

Acta Phys. Pol. A

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In this work, the current-voltage characteristics in a 90%helium-10%argon gas mixture glow discharge at low pressure have been studied. Three pressures values are considered 1.5, 2, and 2.5 Torr. The range of voltage is between 150 and 500 V. The model of our system is a fluid of two ordered components, in which the metastable state of the atoms and the radiation effects are included. The parameters of particle transport and their rate coefficients strictly depend on mean electron energy, and they are calculated by using the BOLSIG+ software. The range of the mean electron energy is taken between 0.04 and 133 eV, and the electron energy distribution function is taken in non-Maxwellian form. The results show that the argon ion density is more important than the helium ion density, despite the presence of more constant background helium gas density in the mixture. The normal and abnormal glow discharge modes appear on the electric characteristics. The obtained results are compared to both experimental data and numerical results which exist in the literature.

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Identification of the normal and abnormal glow discharge modes in a neon-xenon gas mixture at low pressure

Cited by 9 publications

References 27 publications

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

Study of the Neon Dielectric Barrier Discharge on a Capacitively Coupled Radio Frequency at a Low Pressure with Metastable Atom Density: Effect of the Pressure

Current-Voltage Characteristics in a Helium-Argon Gas Mixture Glow Discharge at Low Pressure

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