Identification of hydrogen and helium in elastic recoil detection measurements using a compact (ΔE−Er) ionization chamber

“…Our current ERDA-RBS system, however, does not work effectively for hydrogen detection. To obtain the enough E of hydrogen, the length of the electrodes should be longer [27] or the gas pressure should be higher [28] than those in our system. It seems to be not straightforward to precisely quantify hydrogen and oxygen in metal-oxide-based thin films simultaneously with common parameters in a single E-E telescope ERDA system.…”

Section: Application To Samples With Other Light Elementsmentioning

confidence: 99%

Development of ΔE-E telescope ERDA with 40 MeV 35Cl7+ beam at MALT in the University of Tokyo optimized for analysis of metal oxynitride thin films

Harayama

Nagashima

Hirose

et al. 2016

Nuclear Instruments and Methods in Physics Research Section B:

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We have developed a compact E-E telescope elastic recoil detection analysis (ERDA) system, for the first time at Micro Analysis Laboratory, Tandem Accelerator (MALT) in the University of Tokyo, which consists of a gas ionization chamber and solid state detector (SSD) for the quantitative analysis of light elements. The gas ionization chamber is designed to identify the recoils of O and N from metal oxynitrides thin films irradiated with 40 MeV 35 Cl 7+. The length of the electrodes along the beam direction is 50 mm optimized to sufficiently separate energy loss of O and N recoils in P10 gas at 6.0 × 10 3 Pa. The performance of the gas ionization chamber was examined by comparing the ERDA results on the SrTaO2N thin films with semi-empirical simulation and the chemical compositions previously determined by nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry (RBS). We also confirmed availability of the gas ionization chamber for identifying not only the recoils of O and N but also those of lithium, carbon and fluorine.

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