“…In order to explain the mechanism of dislocation density reduction, the characteristics of residual dislocations have been determined in highly doped GaAs, especially for Si and In doping. Various kinds of defects have been found [20] : dislocations emerging from the interface with the seed, glide dislocations, helical dislocations and others with unusual Burgers vectors [21,22]. It can be noted that, for Si or In doped GaAs, there is a relation between the amount of impurities and the shape of dislocations, suggesting that the extent of cross-slip or climb mechanisms depends on the impurity concentration.…”