Identification and suppression of driving force misalignment angle for a MEMS gyroscope using parametric excitation

Abstract

We report for the first time an implementable method to identify and suppress the driving force misalignment angle for a MEMS gyroscope working either in AM or LFM mode using parametric excitation. By introducing driving force misalignment angle into gyroscope dynamic equations, we illustrate that gyroscope angular rate output is affected by driving force misalignment angle and cross-axis damping jointly. We propose parametric excitation as a way to both identify and calculate the driving force misalignment angle. The identification results for a gyroscope working in both AM and LFM mode are similar, which indicates the effectiveness of the proposed identification method. Instead of using traditional amplitude control loop by adjusting the driving force, we do the automatic gain control by adjusting the parametric pump voltage so that a fixed drive voltage can be used, which also indicates fixed force coupling. Experimental results show that after suppression, the bias instability (BI) of AM mode is improved from 4.7 deg/h to 2.3 deg/h and the BI of LFM mode is improved from 1.4 deg/h to 0.9 deg/h which is the lowest result reported for LFM gyroscope.

Design, Optimization and Performance Assessment of Single Port Film Bulk Acoustic Resonator through Finite Element Simulation

“…However, the existing integrated circuit (IC) technology has encountered limitations in reducing the size of RF components required for these systems. Despite this, advancements in micro-fabrication processes have facilitated the production of these components, even within the constraints of current silicon CMOS technology [1][2][3][4][5][6]. Surface acoustic wave (SAW) and quartz crystal microbalance (QCM) resonators are capable of operating in the frequency range of up to 500 MHz.…”

Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope

“…While the impact of phase errors has been studied in AM and WA operations, its effect on the LFM operation remains unknown [32,33]. Coincidentally, when there is a deviation angle between the force and the mode, it generates a component force in the orthogonal direction, which resembles the impact of the system phase error on the driving force deflection [34]. Indeed, it is noteworthy that all errors are inherently interactive, precluding absolute elimination and collectively impacting the SF and zero rate output (ZRO).…”