“…To date, microgrippers with various kinds of actuators, including the electrostatic actuator (Boudaoud et al, 2013; Felix et al, 2021), shaped memory alloy actuator (AbuZaiter et al, 2016; Yurtsever and Küçük, 2020), electromagnetic actuator (Go et al, 2016; Xiao and Li, 2014), electrothermal actuator (Chu et al, 2011; Soma et al, 2018), and piezoelectric actuator (Chen et al, 2020; Nah and Zhong, 2007; Rakotondrabe et al, 2011), have been developed. In particular, the piezoelectric actuator is extensively used in many microgrippers because of its high resolution, fast response speed, and high output stiffness (Qiu and Wang, 2019; Zhu et al, 2016b).…”