Ideal Sensor Chips —A Smart Microsensor Chip with LSI and MEMS Process and Materials—

Abstract

chip with LSI, CMOS and MEMS process, SOI material and devices, VLS probe chip, pH image sensor The sensor chips developed in Toyohashi University of Technology and the facility called the "LSI factory" since 1979 were reviewed. The original and unique devices were fabricated using not only the standard Si-LSI process and materials, but also the MEMS process and materials. Researchers including students can fabricate their own devices by themselves, which could lead to the production of original prototype devices using special processes and materials together with the CMOS process. Demonstrating the devices is more persuasive than theoretically explaining them in this manuscript. Aside from its educational use, this explains the existence of the LSI factory in Toyohashi University.