Abstract:The integrated circuit (IC) design technology has made the chip density continue to increase. The high performance chips have a high sensitivity to the slightest defects in manufacturing procedure, therefore the defect detection is needed in order to ensure the performances of chip and semiconductor device. For the defects on a wafer, a detection method using image segmentation is presented in this paper. The method performs the segmentation of wafer image by selecting the threshold values. The optimal thresho… Show more
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