In situstudies of growth of carbon nanotubes on a local metal microheater

Abstract

Using electron microscopy and in situ Raman spectroscopy we investigate carbon nanotube growth from ethylene on iron catalyst islands patterned on top of Mo electrodes, using a highly localized resistive on-chip-heating technique. A clear transition is observed between multi-walled and single-walled nanotube growth as the local temperature of the heater is increased. This can be rationalized in terms of the balance between incoming carbon flux and diffusion through the catalyst particle. The observed changes in heater performance on exposure to the hydrocarbon gas are explored and related to the formation of molybdenum carbide, leading to a rapid change in resistivity and heating power that increases the local temperature of the heater by up to 100 °C. This provides optimum conditions for nanotube growth after an incubation time that depends on the carbon flux.

On-Substrate Joule Effect Heating by Printed Micro-Heater for the Preparation of ZnO Semiconductor Thin Film

“…A micro-heater working on the Joule heating principle possesses advantages such as local heat and optimized energy consumption. Therefore, the resistive heater has been employed in application that requires localized heating and temperature control at small scale, such as activation of gas sensing device [18,19], moisture monitoring [20], and local growth of semiconductor nanostructures [21]. The traditional approach of preparing conductive patterns is using photolithography to deposit and remove certain parts of the conductive film and forming the required shape of the film.…”

Localized and Programmable Chemical Vapor Deposition Using an Electrically Charged and Guided Molecular Flux

“…Unfortunately, metallic catalysts might cause unwanted impurities in deposited semiconductors . Other approaches for a localized deposition are laser-assisted CVD, − μ-jet-CVD, aerosol-assisted CVD, − electron beam CVD, scanning tunnel microscopy assisted CVD, and localized heat induced CVD. − Most of them are operating in a serial mode, slowing down the throughput and increasing the processing costs.…”

Inkjet-printed ZnO thin film semiconductor for additive manufacturing of electronic devices

“…Owing to the saving energy feature and the ability to concentrate heat, the resistive micro heater has been utilized in applications such as local growth of functional material nanowires to obtain proper assembling of the material [228] and activating the gas sensing effect [229]. Resistive micro heater working principle is based on the Joule effect where heating is generated in an electrically resistive material by electric current runs through it.…”