<i>In situ</i> laser processing in a scanning electron microscope

Roberts, Nick A.; Magel, Gregory A.; Hartfield, Cheryl; Moore, Terrence J.; Fowlkes, Jason D.; Rack, Philip D.

doi:10.1116/1.4731254

Cited by 20 publications

(17 citation statements)

References 24 publications

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“…FEBID together with synchronized pulsed IR laser heating helped to increase the metal concentration of Au, W, Pt in FEBID deposits, however, did not fully remove the carbon. For deposits obtained from Me 2 Au(acac) the initial atomic ratio of C to Au decreased from 4 to 0.5 with the laser assistance [ 32 ]. For W(CO) 6 FEBID the atomic ratio of W to C was improved from 1:4 to 2:1 [ 33 ].…”

Section: Introductionmentioning

confidence: 99%

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

Szkudlarek¹,

Vaz²,

Zhang³

et al. 2015

Beilstein J. Nanotechnol.

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SummaryIn this paper we study in detail the post-growth annealing of a copper-containing material deposited with focused electron beam induced deposition (FEBID). The organometallic precursor Cu(II)(hfac)2 was used for deposition and the results were compared to that of compared to earlier experiments with (hfac)Cu(I)(VTMS) and (hfac)Cu(I)(DMB). Transmission electron microscopy revealed the deposition of amorphous material from Cu(II)(hfac)2. In contrast, as-deposited material from (hfac)Cu(I)(VTMS) and (hfac)Cu(I)(DMB) was nano-composite with Cu nanocrystals dispersed in a carbonaceous matrix. After annealing at around 150–200 °C all deposits showed the formation of pure Cu nanocrystals at the outer surface of the initial deposit due to the migration of Cu atoms from the carbonaceous matrix containing the elements carbon, oxygen, and fluorine. Post-irradiation of deposits with 200 keV electrons in a transmission electron microscope favored the formation of Cu nanocrystals within the carbonaceous matrix of freestanding rods and suppressed the formation on their surface. Electrical four-point measurements on FEBID lines from Cu(hfac)2 showed five orders of magnitude improvement in conductivity when being annealed conventionally and by laser-induced heating in the scanning electron microscope chamber.

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Section: Introductionmentioning

confidence: 99%

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

Szkudlarek¹,

Vaz²,

Zhang³

et al. 2015

Beilstein J. Nanotechnol.

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“…Furthermore, both laser‐assisted focused ion beam induced deposition and laser‐assisted focused ion beam gas‐assisted etching will be investigated. It is believed that not only will the subsurface damage be mitigated, but deposited material purity will be enhanced as we have demonstrated in laser‐assisted focused electron beam induced deposition . Furthermore, it is expected that laser‐assisted and gas‐assisted etching, in a similar fashion as laser‐assisted focused electron beam induced etching can realize higher etching rates.…”

Section: Discussionmentioning

confidence: 77%

“…Synchronized Laser Probe : The laser delivery system utilized a 915 nm wavelength 25 W multichip diode laser module (BMU25B‐915‐01, Oclaro Inc.) and was mounted on a high angle port (52° relative to the sample stage) on the helium/neon ion microscope (HIM/NIM). The laser probe was aligned such that the focal distance was confocal with the ion beam at a working distance of 7.5 mm with respect to the HIM pole piece.…”

Section: Methodsmentioning

confidence: 99%

In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating

Stanford

Lewis

Iberi

et al. 2016

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Focused helium and neon ion (He(+)/Ne(+)) beam processing has recently been used to push resolution limits of direct-write nanoscale synthesis. The ubiquitous insertion of focused He(+)/Ne(+) beams as the next-generation nanofabrication tool-of-choice is currently limited by deleterious subsurface and peripheral damage induced by the energetic ions in the underlying substrate. The in situ mitigation of subsurface damage induced by He(+)/Ne(+) ion exposures in silicon via a synchronized infrared pulsed laser-assisted process is demonstrated. The pulsed laser assist provides highly localized in situ photothermal energy which reduces the implantation and defect concentration by greater than 90%. The laser-assisted exposure process is also shown to reduce peripheral defects in He(+) patterned graphene, which makes this process an attractive candidate for direct-write patterning of 2D materials. These results offer a necessary solution for the applicability of high-resolution direct-write nanoscale material processing via focused ion beams.

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“…Several strategies have been investigated for purifying EBID deposits (see Botman et al [ 1 ] for a review). In situ purification strategies include: 1) precursors which easily decompose, for instance: WF 6 [ 4 ], Co 2 (CO) 8 [ 5 ], and AuClPF 3 [ 6 ]; 2) mixed gas chemistries which react with the typically organic fragments [ 7 – 8 ] and 3) in situ substrate [ 9 – 10 ] or pulsed laser heating [ 11 – 13 ]. Several ex situ strategies have also been explored.…”

Section: Introductionmentioning

confidence: 99%

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

Lewis¹,

Stanford²,

Fowlkes³

et al. 2015

Beilstein J. Nanotechnol.

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SummaryPlatinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. In addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.

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In situ laser processing in a scanning electron microscope

Cited by 20 publications

References 24 publications

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

Formation of pure Cu nanocrystals upon post-growth annealing of Cu–C material obtained from focused electron beam induced deposition: comparison of different methods

In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating

Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

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