<i>In situ</i> growth of highly oriented Pb(Zr0.5Ti0.5)O3 thin films by low-temperature metal–organic chemical vapor deposition

Bai, G. R.; Tsu, I-Fei; Wang, A.; Foster, C. M.; Murray, C.E.; Dravid, V. P.

doi:10.1063/1.121118

Cited by 33 publications

(12 citation statements)

References 10 publications

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“…These physical vapor deposition techniques yielded high‐quality oxide superconductor films just a few nanometers in thickness, 115–117 superlattices of superconducting oxides with atomic‐scale thickness control and abrupt interfaces, 110,118–126 and the construction of new oxide superconducting phases with atomic layer precision 76,127 . Chemical techniques including metal‐organic chemical vapor deposition (MOCVD) 128–143 and chemical solution deposition (CSD) 144–148 have also been adapted and applied to functional oxides, particularly ferroelectrics. In recent years, a growing cadre of researchers has applied these physical and chemical techniques with increasing precision to the growth of an ever‐broadening set of functional oxide materials.…”

Section: Synthesis Of Epitaxial Oxide Films By Pulsed‐laser Deposmentioning

confidence: 99%

A Thin Film Approach to Engineering Functionality into Oxides

Schlom

Chen

Pan

et al. 2008

Journal of the American Ceramic Society

486

358

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The broad spectrum of electronic and optical properties exhibited by oxides offers tremendous opportunities for microelectronic devices, especially when a combination of properties in a single device is desired. Here we describe the use of reactive molecular‐beam epitaxy and pulsed‐laser deposition to synthesize functional oxides, including ferroelectrics, ferromagnets, and materials that are both at the same time. Owing to the dependence of properties on direction, it is often optimal to grow functional oxides in particular directions to maximize their properties for a specific application. But these thin film techniques offer more than orientation control; customization of the film structure down to the atomic‐layer level is possible. Numerous examples of the controlled epitaxial growth of oxides with perovskite and perovskite‐related structures, including superlattices and metastable phases, are shown. In addition to integrating functional oxides with conventional semiconductors, standard semiconductor practices involving epitaxial strain, confined thickness, and modulation doping can also be applied to oxide thin films. Results of fundamental scientific importance as well as results revealing the tremendous potential of utilizing functional oxide thin films to create devices with enhanced performance are described.

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Section: Synthesis Of Epitaxial Oxide Films By Pulsed‐laser Deposmentioning

confidence: 99%

A Thin Film Approach to Engineering Functionality into Oxides

Schlom

Chen

Pan

et al. 2008

Journal of the American Ceramic Society

486

358

View full text Add to dashboard Cite

show abstract

“…Several thin film growth techniques such as molecular beam epitaxy, [80][81][82][83] pulsed laser deposition, [84][85][86] sputtering, [87][88][89][90][91][92][93] metal-organic chemical vapor deposition, [94][95][96][97][98] and chemical solution deposition 99 etc. have been used to synthesize high quality complex oxide thin films.…”

Section: Synthesis and Characterization Of Thermoelectric Complementioning

confidence: 99%

Thermoelectric and thermal transport properties of complex oxide thin films, heterostructures and superlattices

Ravichandran

2016

J. Mater. Res.

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Over the years, the search for high performance thermoelectric materials has been dictated by the "phonon glass and electron crystal (PGEC)" paradigm, which suggests that low band gap semiconductors with high atomic number elements and high carrier mobility are the ideal materials to achieve high thermoelectric figure of merit. Complex oxides provide alternative mechanisms such as large density of states and strong electron correlation for high thermoelectric efficiency, albeit having low carrier mobility. Due to vast structural and chemical flexibility, they provide a fertile playground to design high efficiency thermoelectric materials. Further, developments in oxide thin film growth methods have enabled synthesis of high quality, atomically precise low dimensional structures such as heterostructures and superlattices. These materials and structures act as excellent model systems to explore nanoscale thermal and thermoelectric transport, which will not only expand the frontier of our knowledge, but also continue to enable cutting edge applications.

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“…Small grains and dark phases were found in the surface of (c) PZT/RuO 2 thin films. It was reported that these dark phases were associated with Pbdeficient phyrochlore-like phases [12]. Fig.…”

Section: Resultsmentioning

confidence: 98%