In this work the growth of crystallographically oriented pores in n type InP is studied. The evolution of the pore structure with time is outlined in detail. It is found that growth and branching of these pores in different crystallographic directions depend on the etching time. Besides an ex-situ evaluation of the pore structure by micros-copy, in-situ FFT impedance spectroscopy measurements have been performed. A model has been found which fits the data consistently. First steps towards a physico-chemical understanding of the processes underlying the pore growth have been made, yielding a qualitative view of pore growth.