2013
DOI: 10.1021/am400520d
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In Situ Determination of the Pore Opening Point during Wet-Chemical Etching of the Barrier Layer of Porous Anodic Aluminum Oxide: Nonuniform Impurity Distribution in Anodic Oxide

Abstract: Wet-chemical etching of the barrier oxide layer of anodic aluminum oxide (AAO) was systematically investigated by using scanning electron microscopy (SEM), secondary ion mass spectrometry (SIMS), and a newly devised experimental setup that allows accurate in situ determination of the pore opening point during chemical etching of the barrier oxide layer. We found that opening of the barrier oxide layer by wet-chemical etching can be significantly influenced by anodization time (tanodi). According to secondary i… Show more

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Cited by 102 publications
(108 citation statements)
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“…One of the most-important features of porous AAO membranes is that the pore diameter (D p ) can be controlled precisely by chemical etching time (t etch ) and temperature [28]. As shown in Fig.…”
Section: Outer Layermentioning
confidence: 99%
“…One of the most-important features of porous AAO membranes is that the pore diameter (D p ) can be controlled precisely by chemical etching time (t etch ) and temperature [28]. As shown in Fig.…”
Section: Outer Layermentioning
confidence: 99%
“…The incorporation of acid anions occurs via inward migrations under an electric field (E) during the anodization. The amount of incorporated acid anions and their spatial distribution in AAO depend on the type and concentration of electrolytes, anodizing potential (U), current density (j), and temperature (T) [28,[107][108][109][110][111][112]. The incorporated electrolyte anions influence the chemical, optical, and mechanical properties of porous AAOs.…”
Section: Pore Wideningmentioning
confidence: 99%
“…For a given set of pore widening conditions (i.e., temperature and concentration of an etchant solution), the rate of oxide etching is dependent on the chemical composition of the pore wall oxide [112]. Figure 4.8 shows the systematic increase in pore diameter (D p ) with the pore widening time (t etch ) for porous AAOs formed in H 2 SO 4 , H 2 C 2 O 4 , and H 3 PO 4 .…”
Section: Pore Wideningmentioning
confidence: 99%
“…Because it is difficult to obtain such similar high-aspect ratio porous materials by other techniques, anodic porous alumina has been widely investigated by researchers in nano-science and engineering applications, such as fundamentals [5][6][7] [41]. In particular, anodizing in sulfuric, selenic, oxalic, malonic, tartaric, and phosphoric acid solutions under the appropriate electrochemical conditions causes self-ordering growth of the porous alumina [1,2,42].…”
Section: Introductionmentioning
confidence: 99%
“…Because it is difficult to obtain such similar high-aspect ratio porous materials by other techniques, anodic porous alumina has been widely investigated by researchers in nano-science and engineering applications, such as fundamentals [5][6][7], nanotemplates [8][9][10][11], optical devices [12][13][14], sensors [15][16][17], and catalysts [18][19][20].…”
Section: Introductionmentioning
confidence: 99%