2016
DOI: 10.1088/0964-1726/25/12/127002
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In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

Abstract: The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables thedetermination of thelocal properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of theYoung's modulus, and canthus beused for monitoring of the spatial distribution of thefunctional properties in films prepar… Show more

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Cited by 19 publications
(6 citation statements)
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References 27 publications
(54 reference statements)
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“…Transient grating spectroscopy (TGS) is an experimental method for measuring surface acoustic wave (SAW) velocity, involving excitation and detection of narrowband SAWs. In this work, the modification of this setup as described in [16] was used. The narrowband excitation was achieved by sending a pump-beam (1064 nm, pulse energy 90 µJ, pulse duration 400 ps) through a diffraction transmission grating.…”
Section: Tgs Measurementmentioning
confidence: 99%
“…Transient grating spectroscopy (TGS) is an experimental method for measuring surface acoustic wave (SAW) velocity, involving excitation and detection of narrowband SAWs. In this work, the modification of this setup as described in [16] was used. The narrowband excitation was achieved by sending a pump-beam (1064 nm, pulse energy 90 µJ, pulse duration 400 ps) through a diffraction transmission grating.…”
Section: Tgs Measurementmentioning
confidence: 99%
“…The SAWs method has been used in finding the mechanical properties such as thickness and Young's modulus of films from 40 nm to 1 µm thick [18], [26]- [28]. It has also been used in finding the temperature effect on Young's modulus of alloys [29] and measuring damage of a steel surface [30]. The results from SAWs measurement is very similar or even better than the results from nanoindention method [31], [32].…”
Section: Background Of Acoustic Measurementsmentioning
confidence: 99%
“…This velocity dispersion can be used to find the elastic properties and thickness of the thin film [20]. This technique has been used to find one or two mechanical properties of various thin films less than 1 µm thick [21], [22], the Young's modulus of films as thin as 100 nm [20], the Young's modulus and porosity of 500-nm-thick films [23], the elastic properties of ultrathin (less than 40 nm thick) films [24], changes in a steel surface due to radiation damage [25], and changes in the Young's modulus of films of shape memory alloys at different temperatures [26]. It has also been compared to nanoindentation for finding the elastic modulus of thin films with a high surface roughness [27] and nanostructured films with surface roughness [28], where the SAW method gave results similar to or better than nanoindentation.…”
Section: Previous Acoustic Workmentioning
confidence: 99%