1988
DOI: 10.1063/1.100489
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I ns i t u formation of superconducting YBa2Cu3O7−x thin films using pure ozone vapor oxidation

Abstract: Superconducting YBa2Cu3O7−x thin films have been prepared by coevaporation using an ozone vapor jet as an oxygen source. Films exhibiting zero resistance at 82 K have been fabricated in situ under high vacuum conditions using substrate temperatures of 700 °C without a post-evaporation anneal in oxygen. This process has implications for in situ measurements of fully superconducting surfaces using a variety of probes as well as for the fabrication of devices and structures whose properties are dependent on surfa… Show more

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Cited by 133 publications
(14 citation statements)
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“…A fresh O 3 sample is prepared before each experiment in a high-vacuum glass line, following the procedure as described in Ref. 25 O in the high vacuum gas line. The contamination is found to increase with time and to be less ∼1 monolayer (ML) at the end of all experiments.…”
Section: Methodsmentioning
confidence: 99%
“…A fresh O 3 sample is prepared before each experiment in a high-vacuum glass line, following the procedure as described in Ref. 25 O in the high vacuum gas line. The contamination is found to increase with time and to be less ∼1 monolayer (ML) at the end of all experiments.…”
Section: Methodsmentioning
confidence: 99%
“…This can be done, e.g. by an RF field maintained near the substrates [7) by passing the oxygen through a microwave cavity or by replacing the oxygen by ozone [8]. These examples show that in any case the rate controlled e-gun systems which were often used before for deposition of films like Nb3(GeAl) or other compound systems have to be equipped with additional technical means ifHTSC films shall be prepared in the 2-step process.…”
Section: The 3-step and The 2-step Preparation Proceduresmentioning
confidence: 99%
“…We highlight these details and demonstrate through the verification of Homes scaling[2] that that this approach is nevertheless a powerful alternative to chemical doping for systematically studying the properties of high-temperature superconductors. This is true despite the fact that the doping in this material may not be a purely electrostatic effect.These films were grown by ozone-assisted molecular beam epitaxy [3]. We use Cu and La Knudsen effusion cells to produce stable rates for these two materials.…”
mentioning
confidence: 99%