Crystallized polycrystalline barium strontium titanate (Ba 0:5 Sr 0:5 TiO 3 ) thin films have been synthesized on the titanium metal substrates by an environmentally conscious method of hydrothermal synthesis. The films were characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and scanning electronic micrographs (SEM) respectively. The XRD analyses show that the as-grown films are a cubic phase containing a little unidentified phase, which would tend to be a pure cubic phase after being annealed at 600 C for 30 minutes; the XPS analyses reveal that the composition of the as grown Ba 0:5 Sr 0:5 TiO 3 films is agreement with the stoichiometry, and the valences of Ba, Sr, Ti, and O elements of the films are þ2, þ2, þ4, and À2 respectively; the SEM photographs show that the films are condensely synthesized; and the AFM analyses show that the average surface roughness and the root-mean-square (rms) of the film measured are 0.257 mm and 0.323 mm respectively. It is concluded that an environmentally conscious method of hydrothermal synthesis can be used for preparing multi-element oxide thin films.