Hydrostatic ionic liquid-lubricated fluid film bearing for a rotational electron-beam lithography system

Okabe, Takao; Sasaki, Shinya; Kondo, Yukishige; Miyatake, Masaaki; Yoshimoto, Shigeka

doi:10.1016/j.precisioneng.2019.10.008

Cited by 6 publications

(3 citation statements)

References 21 publications

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“…In the middle of the IL flow pipe, a valve is used to adjust the flow rate. As in previous studies, ammonium-type IL (Product No.11468-35, KANTO CHEMICAL Co., Inc.), with properties listed in Table 1, was chosen [9][10][11]. In this study, 100-mL of IL that is the large volume liquid for the vacuum system, was used.…”

Section: Methodsmentioning

confidence: 99%

“…4. This pump was designed with new parameters based on previous studies [11]. The pump sends liquids through a pipe using a rotating rotor with spiral grooves.…”

Section: Methodsmentioning

confidence: 99%

“…It was demonstrated that, this spindle can be drawn in a nanoscale pattern on a semiconductor wafer by electron beam lithography [10]. A hydrostatic spindle with an IL circulation pump was also developed and investigated for its outgas performance [11]. From these previous studies, ILs can be used in vacuum as the working fluid of a machine and a high-vacuum environment can be maintained even if ILs of the order of milliliters are circulated as the working fluid of a machine.…”

Section: Introductionmentioning

confidence: 99%

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Development of a Hydrostatic Bearing in High Vacuum Using an Ionic Liquid for a Semiconductor Fabrication Device

Okabe,

Somaya

2024

Advances in Science and Technology

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A hydrostatic bearing using ionic liquid (IL) has been developed to float semiconductor wafers in a high vacuum chamber. In semiconductor manufacturing, it is important to suppress overheating of wafers and maintain a constant temperature distribution. This method aims to achieve uniform temperature distribution by supplying IL from the backside of the wafer to float it, thereby without mechanical contact. However, since there are no examples of wafers levitated by hydrostatic bearings using IL in a high-vacuum environment, the effect of circulating IL to the vacuum conditions such as vacuum pressure and outgassing were investigated in this study. Experimental results showed that the developed prototype machine was capable of maintaining a stable ultrahigh-vacuum of 10-5 Pa and supplying sufficient pressure to levitate wafers even when 100 ml of IL was circulated.

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Section: Methodsmentioning

confidence: 99%

“…4. This pump was designed with new parameters based on previous studies [11]. The pump sends liquids through a pipe using a rotating rotor with spiral grooves.…”

Section: Methodsmentioning

confidence: 99%