Hydrophobic coatings for MEMS applications

Doms, Marco; Feindt, Holger; Kuipers, Winfred; Shewtanasoontorn, D; Matar, A.; Brinkhues, S; Welton, R H; Mueller, Joerg

doi:10.1088/0960-1317/18/5/055030

Cited by 30 publications

(23 citation statements)

References 20 publications

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“…Typically, PAA grafts yield a water contact angle of 60°–70° . By contrast, native PDMS has a water contact angle of 104° and a water contact angle of 110° was reported for silicon substrates coated with PFOTS . Medium is flowed through the aqueous channel and the oil stream is generated by two oil flows—one containing gel droplets and a second for sheath fluid to space out the hydrogel droplets (Figure S1, Supporting Information).…”

Section: Resultsmentioning

confidence: 99%

“…water contact angle of 110° was reported for silicon substrates coated with PFOTS. [43] Medium is flowed through the aqueous channel and the oil stream is generated by two oil flows-one containing gel droplets and a second for sheath fluid to space out the hydrogel droplets ( Figure S1, Supporting Information). We measured the extraction efficiency as the ratio between the number of droplets merging with the aqueous phase and the total number of droplets passing the interface of the extraction chip, as a function of the applied voltage ( Figure 2B,C).…”

Section: Single Cell Encapsulation Into Hydrogel Beadsmentioning

confidence: 99%

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Long‐Term Perfusion Culture of Monoclonal Embryonic Stem Cells in 3D Hydrogel Beads for Continuous Optical Analysis of Differentiation

Kleine‐Brüggeney

Vliet

Mulas

et al. 2018

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Developmental cell biology requires technologies in which the fate of single cells is followed over extended time periods, to monitor and understand the processes of self‐renewal, differentiation, and reprogramming. A workflow is presented, in which single cells are encapsulated into droplets (Ø: 80 µm, volume: ≈270 pL) and the droplet compartment is later converted to a hydrogel bead. After on‐chip de‐emulsification by electrocoalescence, these 3D scaffolds are subsequently arrayed on a chip for long‐term perfusion culture to facilitate continuous cell imaging over 68 h. Here, the response of murine embryonic stem cells to different growth media, 2i and N2B27, is studied, showing that the exit from pluripotency can be monitored by fluorescence time‐lapse microscopy, by immunostaining and by reverse‐transcription and quantitative PCR (RT‐qPCR). The defined 3D environment emulates the natural context of cell growth (e.g., in tissue) and enables the study of cell development in various matrices. The large scale of cell cultivation (in 2000 beads in parallel) may reveal infrequent events that remain undetected in lower throughput or ensemble studies. This platform will help to gain qualitative and quantitative mechanistic insight into the role of external factors on cell behavior.

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Section: Resultsmentioning

confidence: 99%

Section: Single Cell Encapsulation Into Hydrogel Beadsmentioning

confidence: 99%

Long‐Term Perfusion Culture of Monoclonal Embryonic Stem Cells in 3D Hydrogel Beads for Continuous Optical Analysis of Differentiation

Kleine‐Brüggeney

Vliet

Mulas

et al. 2018

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“…Only a thin CVD layer of an expensive fluoropolymer can impart desired surface properties to a substrate that is inexpensive and/or has superior bulk properties. Often used in combination with surface roughness to create hydrophobic and oleophobic surfaces,66, 67 low‐surface‐energy CVD films have found application in MEMS devices,68 antifouling/biofouling and stain‐resistant textiles,69 antiwetting, antisnow, and ice adherence 70…”

Section: Characteristics Of Cvd Polymersmentioning

confidence: 99%

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

et al. 2010

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Chemical vapor deposition (CVD) polymerization utilizes the delivery of vapor-phase monomers to form chemically well-defined polymeric films directly on the surface of a substrate. CVD polymers are desirable as conformal surface modification layers exhibiting strong retention of organic functional groups, and, in some cases, are responsive to external stimuli. Traditional wet-chemical chain- and step-growth mechanisms guide the development of new heterogeneous CVD polymerization techniques. Commonality with inorganic CVD methods facilitates the fabrication of hybrid devices. CVD polymers bridge microfabrication technology with chemical, biological, and nanoparticle systems and assembly. Robust interfaces can be achieved through covalent grafting enabling high-resolution (60 nm) patterning, even on flexible substrates. Utilizing only low-energy input to drive selective chemistry, modest vacuum, and room-temperature substrates, CVD polymerization is compatible with thermally sensitive substrates, such as paper, textiles, and plastics. CVD methods are particularly valuable for insoluble and infusible films, including fluoropolymers, electrically conductive polymers, and controllably crosslinked networks and for the potential to reduce environmental, health, and safety impacts associated with solvents. Quantitative models aid the development of large-area and roll-to-roll CVD polymer reactors. Relevant background, fundamental principles, and selected applications are reviewed.

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“…The polymeric nano pillar patterns on the glass substrate were replicated by the UV nanoimprinting process with the fabricated polymeric nanostamp. Additionally, we deposited a fluoroctatrichlorosilane (FOTS) on silicon nanomaster and an octafluorocyclobutane on polymeric nanostamp, respectively, using evaporation process to improve the releasing property of silicon nanomaster and polymeric nanostamp, before the UV nanoimprinting process [17], [18]. Finally, to apply the nanoimprinted polymeric nano pillar patterns on glass substrate to perpendicular patterned magnetic media, we deposited magnetic layers on the nanoimprinted polymeric nano pillar patterns and the magnetic characteristics were examined.…”

Section: Introductionmentioning

confidence: 99%

Design and Fabrication of Perpendicular Patterned Magnetic Media Using Nanoimprinted Nano Pillar Patterns

et al. 2009

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Perpendicular patterned magnetic media have been regarded as a one of candidate to achieve an ultrahigh density magnetic data starage media of over 1 Tb/in 2 . One approach to producing patterned magnetic media is deposition of thin magnetic films on pre-etched nano pillar array prepared with nanoimprinting technology. In this paper, we have investigated the feasibility of the polymeric nano pillar patterns on glass substrate, which were replicated by UV nanoimprinting process with the polymeric nanostamp, and magnetic layer deposition technology without additional etching process to fabrication for perpendicular patterned magnetic media. The polymeric nano pillar patterns were replicated by 2-step UV nanoimprinting process by using a silicon nanomaster with nano pillar patterns. We deposited magnetic layers on the nanoimprinted nano pillar patterns to make the perpendicular patterned magnetic media. Finally, we show that the fabricated magnetic media could be used for perpendicular patterned magnetic media by measurement of magnetic characteristics.

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Hydrophobic coatings for MEMS applications

Cited by 30 publications

References 20 publications

Long‐Term Perfusion Culture of Monoclonal Embryonic Stem Cells in 3D Hydrogel Beads for Continuous Optical Analysis of Differentiation

Long‐Term Perfusion Culture of Monoclonal Embryonic Stem Cells in 3D Hydrogel Beads for Continuous Optical Analysis of Differentiation

Chemical Vapor Deposition of Conformal, Functional, and Responsive Polymer Films

Design and Fabrication of Perpendicular Patterned Magnetic Media Using Nanoimprinted Nano Pillar Patterns

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