2011
DOI: 10.1116/1.3670963
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Hydrophilic mechanical buffer layers and stable hydrophilic finishes on polydimethylsiloxane using combined sequential vapor infiltration and atomic/molecular layer deposition

Abstract: Polydimethylsiloxane (PDMS) is an important polymer material widely used for microfluidic device fabrication, microcontact lithography, and surface morphology molding. However, the hydrophobic surface limits its functionality. Low temperature atomic layer deposition (ALD) has recently been used to functionalize a wide range of polymer surfaces. In previous research, the authors were able to produce a uniform hydrophilic alumina film coating on PDMS using trimethyl aluminum/water ALD. However, the surface recov… Show more

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Cited by 36 publications
(39 citation statements)
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“…When metal precursors are combined with alcohols or phenols, the resultant material is often called “metalcone” [ 27 ]. Most of the research has been focused on the aluminum-based alucones [ 12 13 15 16 38 39 81 97 ], but also zincones [ 13 , 33 , 38 39 46 , 51 52 56 , 94 95 98 103 ], titanicones [ 53 , 55 , 95 , 104 105 ], and zircones [ 54 , 87 ] have been studied. The schematic structure of ideally growing TMA+ethane-1,2-diol, DEZ+benzene-1,4-diol and TMA+oxiran-2-ylmethanol hybrid films are shown in Fig.…”
Section: Reviewmentioning
confidence: 99%
“…When metal precursors are combined with alcohols or phenols, the resultant material is often called “metalcone” [ 27 ]. Most of the research has been focused on the aluminum-based alucones [ 12 13 15 16 38 39 81 97 ], but also zincones [ 13 , 33 , 38 39 46 , 51 52 56 , 94 95 98 103 ], titanicones [ 53 , 55 , 95 , 104 105 ], and zircones [ 54 , 87 ] have been studied. The schematic structure of ideally growing TMA+ethane-1,2-diol, DEZ+benzene-1,4-diol and TMA+oxiran-2-ylmethanol hybrid films are shown in Fig.…”
Section: Reviewmentioning
confidence: 99%
“…A number of factors suggest that the H 2 O outgassing has little to no effect in NP encapsulation observed with TMA exposure to PA-6, including no evidence of similar effects observed in the infiltration process on PET and PBT polymers that contain little (< 1%) to no water content. 41 We have also previously reported evidence for PA-6 softening and flow during exposure to TMA, suggesting that the TMA significantly effects the polymer chains. 31 Despite the possible competing infiltration mechanisms presented, a uniform layer was observed through the SVI processing considered in this work.…”
Section: Resultsmentioning
confidence: 88%
“…[6][7][8][9] One way to create hydrophilic coatings is by depositing oxide layers on the substrate. [10][11][12][13][14][15][16][17] Since many oxides have hydrophilic surfaces, they represent excellent candidates for hydrophilic coatings. However, most oxide deposition methods require high temperatures and are therefore not suited for polymer substrates.…”
Section: Introductionmentioning
confidence: 99%