Hydrogenated amorphous silicon schottky solar cells: The effects of contamination by dopants in the undoped layer

Cross-contamination in single-chamber processes for thin-film silicon solar cells

“…Also, a 15' evacuation cycle reduces the B cross-contamination to a tolerable level [7,[9][10][11]. Second, there is phosphorus (P) cross-contamination originating from an n-layer deposition that may affect the subsequent p-doped layer (II.a,II.b) as well as the subsequent i-layer (II.a,II.b) [11][12][13]. P cross-contamination of the amorphous part may be induced by the n-layer of a preceding (tandem) cell.…”