2004
DOI: 10.1007/1-4020-2669-2_38
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Hydrogenated Amorphous Silicon Carbide Films as Perspective Tribological Coatings and Semiconductor Layers

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Cited by 2 publications
(1 citation statement)
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“…This thermally and chemically stable wide-bandgap dielectric material has superior mechanical strength, high radiation resistance, and high optical transmittance [ 1 ]. Amorphous SiC appears to be suitable as protective coating against corrosion, moisture, etching, and abrasion [ 2 , 3 ], and has shown promise in optoelectronics [ 4 , 5 ], electronic device insulation [ 6 , 7 ], as well as for biomedical applications [ 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Amorphous SiC is specifically considered as an advantageous material for the isolation of neural implantable devices [ 11 , 18 , 19 , 20 ] as it is inherently insulating; has high-K dielectric properties, high wear resistance, and direct binding to Si; and works well as a durable, biocompatible, and hemocompatible coating.…”
Section: Introductionmentioning
confidence: 99%
“…This thermally and chemically stable wide-bandgap dielectric material has superior mechanical strength, high radiation resistance, and high optical transmittance [ 1 ]. Amorphous SiC appears to be suitable as protective coating against corrosion, moisture, etching, and abrasion [ 2 , 3 ], and has shown promise in optoelectronics [ 4 , 5 ], electronic device insulation [ 6 , 7 ], as well as for biomedical applications [ 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Amorphous SiC is specifically considered as an advantageous material for the isolation of neural implantable devices [ 11 , 18 , 19 , 20 ] as it is inherently insulating; has high-K dielectric properties, high wear resistance, and direct binding to Si; and works well as a durable, biocompatible, and hemocompatible coating.…”
Section: Introductionmentioning
confidence: 99%