Hydrogenated Amorphous Silicon Carbide Films as Perspective Tribological Coatings and Semiconductor Layers

Иващенко, В. И.; Porada, O. K.; Ivashchenko, L. A.; Rusakov, G. V.; Dub, S. N.; Попов, В. М.

doi:10.1007/1-4020-2669-2_38

Cited by 2 publications

(1 citation statement)

References 14 publications

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“…This thermally and chemically stable wide-bandgap dielectric material has superior mechanical strength, high radiation resistance, and high optical transmittance [ 1 ]. Amorphous SiC appears to be suitable as protective coating against corrosion, moisture, etching, and abrasion [ 2 , 3 ], and has shown promise in optoelectronics [ 4 , 5 ], electronic device insulation [ 6 , 7 ], as well as for biomedical applications [ 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 ]. Amorphous SiC is specifically considered as an advantageous material for the isolation of neural implantable devices [ 11 , 18 , 19 , 20 ] as it is inherently insulating; has high-K dielectric properties, high wear resistance, and direct binding to Si; and works well as a durable, biocompatible, and hemocompatible coating.…”

Section: Introductionmentioning

confidence: 99%

Amorphous SiC Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition for Passivation in Biomedical Devices

Greenhorn,

Bano,

Stambouli

et al. 2024

Materials

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Amorphous silicon carbide (a-SiC) is a wide-bandgap semiconductor with high robustness and biocompatibility, making it a promising material for applications in biomedical device passivation. a-SiC thin film deposition has been a subject of research for several decades with a variety of approaches investigated to achieve optimal properties for multiple applications, with an emphasis on properties relevant to biomedical devices in the past decade. This review summarizes the results of many optimization studies, identifying strategies that have been used to achieve desirable film properties and discussing the proposed physical interpretations. In addition, divergent results from studies are contrasted, with attempts to reconcile the results, while areas of uncertainty are highlighted.

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