Hydrogen sensing performance of a Pd nanoparticle/Pd film/GaN-based diode

Chen, Huey-Ing; Cheng, Yu-Chih; Chang, Che-Wei; Chen, Wei-Cheng; Liu, I-Ping; Lin, Kun-Wei; Liu, Wen‐Chau

doi:10.1016/j.snb.2017.03.039

Cited by 23 publications

(10 citation statements)

References 34 publications

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“…Besides stability, in this domain, a large area of interactions between the sensitive material and gas is desired. In other words, nanostructured porous materials are ideal for obtaining the highest sensitivity for gas sensors because they possess high surface to volume ratio, fast charge diffusion and large penetration depth [1,2].…”

Section: Introductionmentioning

confidence: 99%

Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Constantinoiu

Viespe

2020

Nanomaterials

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The influence of sensitive porous films obtained by pulsed laser deposition (PLD) on the response of surface acoustic wave (SAW) sensors on hydrogen at room temperature (RT) was studied. Monolayer films of TiO 2 and bilayer films of Pd/TiO 2 were deposited on the quartz substrates of SAW sensors. By varying the oxygen and argon pressure in the PLD deposition chamber, different morphologies of the sensitive films were obtained, which were analyzed based on scanning electron microscopy (SEM) images. SAW sensors were realized with different porosity degrees, and these were tested at different hydrogen concentrations. It has been confirmed that the high porosity of the film and the bilayer structure leads to a higher frequency shift and allow the possibility to make tests at lower concentrations. Thus, the best sensor, Pd-1500/TiO 2 -600, with the deposition pressure of 600 mTorr for TiO 2 and 1500 mTorr for Pd, had a frequency shift of 1.8 kHz at 2% hydrogen concentration, a sensitivity of 0.10 Hz/ppm and a limit of detection (LOD) of 1210 ppm. SAW sensors based on such porous films allow the detection of hydrogen but also of other gases at RT, and by PLD method such sensitive porous and nanostructured films can be easily developed.

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Section: Introductionmentioning

confidence: 99%

Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Constantinoiu

Viespe

2020

Nanomaterials

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“…Comparison of the Pd thin film/PdNPs hydrogen gas sensors based on the different sensing parameter and different hydrogen concentrations have been shown in Table I. It can be seen in Table I, the response time of PdNPs MOS capacitor is smaller than Pd thin film hydrogen gas senor with voltage, resistance and current sensing parameters (Hassan et al, 2016;Lo et al, 2013;Hu et al, 2013;Duy et al, 2015;Yang et al, 2014;Chen et al, 2017;Ling et al, 2014). For Pd-SnO 2 thin film hydrogen Figure 2 C-V curves for the MOS sensor at the room temperature and 0, 1, 2 and 4 per cent hydrogen concentration gas sensor in temperature range RT-275 8 C, the response time is 1 s (Yang et al, 2014).…”

Section: Resultsmentioning

confidence: 99%

Performance of gas nanosensor in 1-4 per cent hydrogen concentration

Pour

Aval

2019

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Purpose This study aims to investigate the fabrication of hydrogen gas sensor based on metal–oxide–semiconductor (MOS) microstructure. The palladium nanoparticles (PdNPs) as gate metal have been deposited on the oxide film using spin coating. Design/methodology/approach The PdNPs and the surface of oxide film were analyzed using Transmission electron microscopy. The capacitance-voltage (C-V) curves for the MOS sensor in 1, 2 and 4 per cent hydrogen concentration and in 100 KHz frequency at the room temperature were reported. Findings The response times for 1, 2 and 4 per cent hydrogen concentration were 2.5 s, 1.5 s and 1 s, respectively. The responses (R per cent) of MOS sensor to 1, 2 and 4 per cent hydrogen concentration were 42.8, 47.3 and 52.6 per cent, respectively. Originality/value The experimental results demonstrate that the MOS hydrogen gas sensor based on the PdNPs gate, shows the fast response and recovery compared to other hydrogen gas sensors based on the Pd.

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“…21−25 We may also note that various sensors based on Schottky diodes operating by the above mechanism or other mechanisms have been reported for a number of applications in both gas–metal and in liquid–metal reactions. 16,26−31…”

Section: Introductionmentioning

confidence: 99%

“…An ultrathin metal film is placed on the surface of a semiconductor substrate so that it creates a Schottky contact. At equilibrium, the electrical current through the metal–semiconductor contact is zero because the thermionic emission current flowing through the Schottky contact in the forward and reverse directions is balanced. , However, when a chemical reaction proceeds on the metal surface, the equilibrium can be disturbed by the formation of excess charge, which leads to the appearance of a nonzero electrical current. − A number of research papers show that this current is proportional to the reaction rate, which makes nanodiode sensors a convenient tool for studying chemical kinetics on nanoscale metal structures. − We may also note that various sensors based on Schottky diodes operating by the above mechanism or other mechanisms have been reported for a number of applications in both gas–metal and in liquid–metal reactions. ,− …”

Section: Introductionmentioning

confidence: 99%

Charge Transfer during the Aluminum–Water Reaction Studied with Schottky Nanodiode Sensors

et al. 2019

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The aluminum–water reaction is a promising source for hydrogen production. However, experimental studies of this reaction are difficult because of the highly concentrated alkaline solution used to activate the surface of aluminum. Here, we show that the reaction kinetics can be monitored in real time by a Schottky diode sensor, consisting of an ultrathin aluminum film deposited on a semiconductor substrate. Charge resulting from the corrosion of the aluminum film causes an electrical signal in the sensor, which is proportional to the rate of the chemical process. We discuss the possible mechanisms for the reaction-induced charge generation and transfer, as well as the use of Schottky diode based sensors for operando studies of the aluminum–water reaction and similar reactions on metals in concentrated alkaline solutions.

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Hydrogen sensing performance of a Pd nanoparticle/Pd film/GaN-based diode

Cited by 23 publications

References 34 publications

Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Development of Pd/TiO2 Porous Layers by Pulsed Laser Deposition for Surface Acoustic Wave H2 Gas Sensor

Performance of gas nanosensor in 1-4 per cent hydrogen concentration

Charge Transfer during the Aluminum–Water Reaction Studied with Schottky Nanodiode Sensors

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