Hydrogen Sensing Characteristics of a Quartz Oscillator

Suzuki, Atsushi

doi:10.5772/48449

Cited by 1 publication

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“…In addition, ρ can be expressed as a product of the molecular weight (M) and pressure (P) of the gas. Therefore, the output from a quartz oscillator depends on ç and M. This means that the Qgauge can detect not only the change in pressure, but also the content of the gas, making it applicable to hydrogen sensing, hydrogen concentration measurements, partial concentration measurements of binary gases, and plasma diagnostics [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20].…”

Section: Introductionmentioning

confidence: 99%

Humidity Calibration for a Pressure Gauge Using a Temperature-Stable Quartz Oscillator

Suzuki

2016

Applied Science and Convergence Technology

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Humidity calibration for a temperature-stable quartz oscillator (TSQO) was investigated to exclude the influences of relative humidity on the TSQO output in order to use the corresponding devices outdoors. The TSQO output is a voltage that is inversely proportional to the electric impedance of the quartz oscillator, which depends on the viscosity and density of the measured gas. The TSQO output was humidity calibrated using its humidity dependence, which was obtained by varying the relative humidity (RH) from 0 to 100 RH% while other conditions were kept constant. The humidity dependencies of the TSQO output were fit by a linear function. Subtracting the change in the TSQO output induced by the change in humidity, calculated with the function from the experimentally measured TSQO output for a range of 0-100RH%, eliminated the influence of humidity on the TSQO output. The humidity calibration succeeded in reducing the fluctuations of the TSQO output from 0.4-3% to 0.1-0.3% of the average values for a range of 0-100RH%, at constant temperatures. The necessary stability of the TSQO output for application in hydrogen sensors was below one-third of the change observed for a hydrogen leakage of 1 vol.% hydrogen concentration, corresponding to 0.33% of the change in each background. Therefore, the results in this study indicate that the present humidity calibration effectively suppresses the influence of humidity, for the TSQO output for use as an outdoor hydrogen sensor.

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