Hydrogen Reduction of Germanium Tetrafluoride in RF-Discharge

Abstract

A germanium tetrafluoride conversion into germanium and polyfluorogermanes in hydrogen inductively coupled RF-discharge plasma (13.56 MHz) has been experimentally studied. The product ratio is dependent on specific energy contribution into discharge. Conditions that ensure practically complete conversion of GeF 4 and the yield of germanium equal to 86 % have been found. The analysis of exhaust gases, of chemically active plasma and of condensed phase by emission-and IR-spectroscopy as well as by mass spectrometry made it possible to propose mechanism accounting for the formation of observed intermediate species and final products.