We have measured the water and hydrogen outgassing rates of seven vacuum chambers of identical geometry but constructed of different materials and heat treatments.Chambers of five different materials were tested: 304L, 316L, and 316LN stainless steels; titanium; and aluminum. In addition, chambers constructed of 316L and 316LN stainless steel were subjected to a vacuum-fire process, where they were heated to approximately 950 °C for 24 hours while under vacuum. These latter two chambers are designated as 316L-XHV and 316LN-XHV. Because all the chambers were of identical geometry and made by the same manufacturer, a relative comparison of the outgassing rates among these chambers can be made. Water outgassing rates were measured as a function of time using the throughput technique. The results for the 304L chamber were in accord with the results of Li and Dylla. 1 The water outgassing results for the 316L, 316LN, 316L-XHV, 316LN-XHV were all similar, but lower than those of 304L by a factor of 3 to 5