The article contains sections titled:
1.
Principles
1.1.
Components
1.2.
Physical Principles
1.2.1.
Equations of State of Gases
1.2.2.
Pressure and Temperature
1.2.3.
Thermal Mean Velocity
1.2.4.
Thermal Particle Interactions
1.2.5.
Flow Regimes, Momentum, and Heat Transfer
1.2.6.
Vacuum Regimes
1.3.
Matter under Vacuum
1.3.1.
Vapor Pressure
1.3.2.
Sorption, Gettering, Permeation
2.
Evacuation
2.1.
Characteristic Quantities
2.2.
Classification of Vacuum Pumps
2.3.
Technology of Vacuum Pumps
2.3.1.
Displacement Pumps
2.3.1.1.
Liquid and Gas Ring Vacuum Pumps
2.3.1.2.
Sliding Vane Rotary, Rotary Plunger, Rotary Piston Pumps
2.3.1.3.
Rotary Lobe Vacuum Pumps
2.3.1.4.
Pump Oils for Rough and Medium Vacuum Pumps
2.3.2.
Kinetic Vacuum Pumps
2.3.2.1.
Working Fluid Jet Vacuum Pumps
2.3.2.2.
Diffusion Pumps
2.3.2.3.
Jet Pumps‐Working Fluids
2.3.2.4.
Drag Vacuum Pumps‐Turbomolecular Pump
2.3.3.
Entrapment Vacuum Pumps
2.3.3.1.
Sorption Vacuum Pumps
2.3.3.2.
Getter Ion Pumps
2.3.3.3.
Condensation Pumps
3.
Vacuum Diagnostics
3.1.
Total Pressure Measurement
3.1.1.
Mechanical Vacuum Instruments
3.1.2.
Viscosity Vacuum Gauge
3.1.3.
Thermal Conductivity Vacuum Gauge
3.1.4.
Ionization Vacuum Gauge
3.1.5.
Measuring Systems
3.2.
Partial Pressure Measurement
3.3.
Leak Surveys
4.
Vacuum System Components
4.1.
Piping Components
4.2.
Vacuum System Feedthroughs
4.3.
Valves
5.
Vacuum System Applications
5.1.
Perspectives on Design of Vacuum Systems
5.2.
Examples of Vacuum Systems and Their Application
5.2.1.
Decontamination of Groundwater
5.2.2.
Degassing Steel with a Steam Jet Vacuum System
5.2.3.
High Vacuum Systems for Manufacturing Thin Films
5.2.4.
Ultra High Vacuum System for the LEP Storage Ring at Geneva