Hydrogen Ion Sensing Properties of Niobium Oxide by RTA and Thickness effect

Chiang, Tsu Wu; Lin, Yuelai; Shin, Moon Young; Juan, T. W.; Chen, T. C.; Lue, C .H.; Lai, Chao‐Sung; Yang, Conghao

doi:10.7567/ssdm.2012.ps-11-11

Extended Abstracts of the 2012 International Conference on Solid State Devices and Materials 2012

DOI: 10.7567/ssdm.2012.ps-11-11

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Hydrogen Ion Sensing Properties of Niobium Oxide by RTA and Thickness effect

Tsu Wu Chiang¹,

Yuelai Lin²,

Moon Young Shin³

et al.

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Hydrogen Ion Sensing Properties of Niobium Oxide by RTA and Thickness effect

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