Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing

Popov, V.; Kilanov, D.V.; Antonova, I. V.; Naumova, O. V.; Stepovik, A. P.; Gromov, V.T.; Misiuk, A.

doi:10.4028/www.scientific.net/ssp.82-84.497

SSP

2001

DOI: 10.4028/www.scientific.net/ssp.82-84.497

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Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing

V. Popov

D.V. Kilanov

I. V. Antonova³

et al.

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Hydrogen-Induced Shallow Donors in Silicon and Silicon-on-Insulator Structures Formed by Hydrogen Slicing

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