Hydrogen–Induced Cleavage of Silicon Wafers by Electrochemical Etching

Тыныштыкбаев, К. Н.; Рябикин, Ю. А.; Tokmoldin, S. Zh.; Рахметов, Б. А.; Айтмукан, Т.

doi:10.17073/1609-3577-2012-4-40-44

Izv. vysš. učebn. zaved., Mater. èlektron. teh.

2015

DOI: 10.17073/1609-3577-2012-4-40-44

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Hydrogen–Induced Cleavage of Silicon Wafers by Electrochemical Etching

К. Н. Тыныштыкбаев¹,

Ю. А. Рябикин²,

S. Zh. Tokmoldin³

et al.

Abstract: Это уникальная книга. Все многолетие учебы или работы в университете недостаточно описать словами, поэтому, чтобы вспомнить, пережить, испытать чувствогордости за себя и за свою Alma-mater -МИСиС мы издали эту книгу. Книгу можно приобрести за наличный и безналичный расчетИздательский Дом МИСиС предлагает:

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Hydrogen–Induced Cleavage of Silicon Wafers by Electrochemical Etching

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