2015
DOI: 10.1016/j.snb.2015.01.129
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Hydrogen gas sensing properties of MoS2/Si heterojunction

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Cited by 103 publications
(45 citation statements)
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“…Firstly, the excellent properties of MoS 2 , such as gas sensing and photoelectrical properties, could be integrated onto Si semiconductors and the fabrication of multifunctional devices would be realized. 11 Secondly, novel electrical characteristics can be caused by the incorporation of the junction area near the interface. 12 Based on the above analysis, MoS 2 thin films were grown on p-type Si substrates using magnetron sputtering technique and the n-MoS 2 /p-Si heterojunctions were fabricated in this study.…”
Section: Introductionmentioning
confidence: 99%
“…Firstly, the excellent properties of MoS 2 , such as gas sensing and photoelectrical properties, could be integrated onto Si semiconductors and the fabrication of multifunctional devices would be realized. 11 Secondly, novel electrical characteristics can be caused by the incorporation of the junction area near the interface. 12 Based on the above analysis, MoS 2 thin films were grown on p-type Si substrates using magnetron sputtering technique and the n-MoS 2 /p-Si heterojunctions were fabricated in this study.…”
Section: Introductionmentioning
confidence: 99%
“…Figure 1e I I I and [H 2 ] in a semilog scale, using a fixed V SD = 1 V and V G = −10 V for 0.5%, 5%, 20%, 25%, and 50% of [H 2 ]. [20,22] The minimal T RES is found to be ≈7 min under 50% of H 2 (see Figure S1 in the Supporting Information), while the T REC is around 67 min for the same concentration. In Figure 1f we show the I SD versus time curve.…”
Section: Resultsmentioning
confidence: 97%
“…[12,13] In fact, MoS 2 transistors have been used to monitor gases such as O 2 , [14] NO, [15] NH 3 , [16,17] NO 2 , [16][17][18] and, in general, sensors based on few layers MoS 2 FETs exhibit advantages comparing with bulk sensors such as transparency, cost-effectiveness for massive production, and high sensitivity. [22] Recently, Agrawal et al [23] have shown a promising H 2 detection system using edgeoriented vertically aligned MoS 2 flakes in a 3D array without any doping, suggesting that bare MoS 2 has the potential for H 2 detection. Some works propose the H 2 detection mechanism that holds only for more complex structures like MoS 2 nanocomposites films doped with palladium (Pd), [20] platinum (Pt), [21] or heterojunctions of MoS 2 films and silicon.…”
Section: Introductionmentioning
confidence: 99%
“…Heterojunctions have their own importance for applications such as chemical sensing. Liu et al fabricated MoS 2 /Si heterojunction for H 2 detection by growing MoS 2 thin film on Si (p‐type, (100)) by DC magnetron sputtering 261. Hydrogen gas concentration of as low as 0.5% was also detectable with the device.…”
Section: Efforts To Improve Performance Of Devices Based On These Matmentioning
confidence: 99%