2010
DOI: 10.1016/j.tsf.2010.07.122
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Hydrogen gas sensing performance of Pd–Ni alloy thin films

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Cited by 115 publications
(96 citation statements)
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References 26 publications
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“…As a result, the current change significantly increases beyond that point and then it is almost saturated at higher H 2 concentrations. The Ni inclusion in Pd suppresses the a to b phase transition [15,16], leading to the linear response behavior over a broad H 2 range. Although this scalable response to high H 2 concentrations is desirable, the overall sensitivity of the PdeNi films appears to be greatly decreased with increasing the Ni content (see Fig.…”
Section: Resultsmentioning
confidence: 99%
“…As a result, the current change significantly increases beyond that point and then it is almost saturated at higher H 2 concentrations. The Ni inclusion in Pd suppresses the a to b phase transition [15,16], leading to the linear response behavior over a broad H 2 range. Although this scalable response to high H 2 concentrations is desirable, the overall sensitivity of the PdeNi films appears to be greatly decreased with increasing the Ni content (see Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Various efforts [7][8][9][10][11] including the use of Pd alloys and reduction of the Pd thickness have been made to suppress the a-to b-phase transition. Recently, Kim et al [12] found that a Pd film of 50-nm thick on a thermally oxidized silicon (SiO 2 /Si) substrate with a titanium (Ti) buffer layer does not have the sensitivity hysteresis at H 2 concentrations of 0.5-1.5 % observed in a film simultaneously deposited on a bare substrate.…”
Section: Introductionmentioning
confidence: 99%
“…With an increase of the Ni content, the crystallinity of the samples decreases. Ni and Pd both have a face-centered cubic lattice structure, and the lattice constant of Ni (3.524 Å) is smaller than that of Pd (3.891 Å) [16]. Therefore, the more Ni substituting Pd atoms, the smaller the lattice constant of the Pd-Ni alloy.…”
Section: Structural Characterizationmentioning
confidence: 99%