2014
DOI: 10.1016/j.surfrep.2014.08.002
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Hydrogen detection near surfaces and shallow interfaces with resonant nuclear reaction analysis

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Cited by 133 publications
(134 citation statements)
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References 721 publications
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“…This implies that by scanning the beam, different depths can be accessed, and the total reaction cross section can be measured to yield concentration information. A detailed review of the technique is given by Wilde and Fukutani [232], where the primary limitations of the method are the achievable resolution within the crystal, and the sensitivity of the method. To the authors' knowledge, there is little direct observation of hydrogen at features such as dislocations and grain boundaries, which makes understanding the role of hydrogen more complex.…”
Section: Experimental Techniques To Detect Hydrogen In Metalsmentioning
confidence: 99%
“…This implies that by scanning the beam, different depths can be accessed, and the total reaction cross section can be measured to yield concentration information. A detailed review of the technique is given by Wilde and Fukutani [232], where the primary limitations of the method are the achievable resolution within the crystal, and the sensitivity of the method. To the authors' knowledge, there is little direct observation of hydrogen at features such as dislocations and grain boundaries, which makes understanding the role of hydrogen more complex.…”
Section: Experimental Techniques To Detect Hydrogen In Metalsmentioning
confidence: 99%
“…Accumulation of hydrogen inside the a-SiO 2 layer has been revealed by a variety of methods (see Ref. [20] and references therein), firmly supporting this conjecture and indicating passivation of the broken bonds by hydrogen [20,21] as well as enhanced mobility of O atoms in the network [22,23]. Although the Si-O bond rupture was initially correlated to the presence of protonic species [24,25] formed by hole trapping [26] or by hydrogen ionization at the Si/SiO 2 interface [27], the involvement of H 0 must be considered as well since atomic hydrogen is by far more abundant than protons in processed a-SiO 2 .…”
mentioning
confidence: 99%
“…Although the Si-O bond rupture was initially correlated to the presence of protonic species [24,25] formed by hole trapping [26] or by hydrogen ionization at the Si/SiO 2 interface [27], the involvement of H 0 must be considered as well since atomic hydrogen is by far more abundant than protons in processed a-SiO 2 . For example, a-SiO 2 layers are inevitably exposed to H 0 during processing of microelectronic devices in H-containing environments ranging from the annealing, deposition, and patterning to electrical stressing and irradiation [20].…”
mentioning
confidence: 99%
“…be converted to the depth scale using the stopping powers. The stopping powers were estimated by the SRIM code 25 using the bulk densities (1.52, 1.37 and 1.28 g/cm 3 for…”
Section: Methodsmentioning
confidence: 99%
“…1,2 Although NRA and ERDA can analyze hydrogen quantitatively, the typical depth resolution of NRA and conventional ERDA is not better than a few nm. 3,4 The depth resolution of ERDA can be improved to sub nm by employing a high-resolution energy spectrometer, which is called high-resolution ERDA (HR-ERDA). 5 As shown below, however, information concerning other elements is necessary for precise hydrogen analysis in ERDA.…”
Section: Introductionmentioning
confidence: 99%