Hydrogen addition to an argon glow discharge: a numerical simulation

Bogaerts, Annemie

doi:10.1039/b200025c

Cited by 51 publications

(68 citation statements)

References 41 publications

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“…This calculation result of relatively high ArH C and H 3 C ion densities and low H C and H 2 C ion densities is also consistent with findings in the literature (see Ref. 38 for more details).…”

Section: Effect Of H 2 On the Ar Glow Dischargesupporting

confidence: 93%

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Glow discharge modelling: from basic understanding towards applications

Bogaerts

Chen

Gijbels

2003

Surface & Interface Analysis

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We have developed a comprehensive modelling network for glow discharge plasmas used for analytical spectroscopy in order to obtain better insight into the plasma characteristics that are desirable for good analytical practice. The modelling network consists of Monte-Carlo, fluid and collisional-radiative models, as well as a heat transfer model and a computational fluid dynamics code, to describe the behaviour of the various plasma species. Typical calculation results include the electrical characteristics (current, voltage, pressure relations), the electric field distribution, the densities, fluxes and energies of the various plasma species, information about the various collisions in the plasma and about cathode sputtering, optical emission intensities, etc. In this paper we focus on results that are of direct analytical interest, such as crater profiles and erosion rates due to sputtering, implantation profiles, glow discharge source design, optical emission intensities and the effect of hydrogen addition.

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Section: Effect Of H 2 On the Ar Glow Dischargesupporting

confidence: 93%

“…38 The densities of the electrons, Ar C ions, Ar metastable atoms, sputtered Cu atoms and Cu C ions are found to decrease considerably as a result of H 2 addition, as is clear from Figs 11(a) and 11(b). A drop in electron and Ar C ion densities is also observed experimentally in the literature.…”

Section: Effect Of H 2 On the Ar Glow Dischargementioning

confidence: 70%

Glow discharge modelling: from basic understanding towards applications

Bogaerts

Chen

Gijbels

2003

Surface & Interface Analysis

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“…The magnetic field coils were used, and the RF power was turned off at t ¼ 500 ls. Pooling ionization in an argon discharge should be inhibited by the addition of hydrogen, 31 which tends to depopulate the argon excited states (the rate coefficients for de-excitation of an argon metastable by collisions with an H 2 molecule or H atom are K H 2 % 10 À16 m 3 =s and K H % 2 Â 10 À16 m 3 =s, respectively, 32 so with a hydrogen partial pressure of 30 mTorr, the mean lifetime of an argon metastable is 10 ls). Fig.…”

Section: Density Rise In the Afterglowmentioning

confidence: 99%

Emission and afterglow properties of an expanding RF plasma with nonuniform neutral gas density

Chaplin

Bellan

2016

Physics of Plasmas

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We describe some notable aspects of the light emission and afterglow properties in pulsed, high-density (1018–1020 m−3) argon inductively coupled discharges initiated following fast gas injection. The plasma was created in a long, narrow discharge tube and then expanded downstream of the radiofrequency (RF) antenna into a large chamber. Fast camera images of the expanding plasma revealed a multi-phase time-dependent emission pattern that did not follow the ion density distribution. Dramatic differences in visible brightness were observed between discharges with and without an externally applied magnetic field. These phenomena were studied by tracking excited state populations using passive emission spectroscopy and are discussed in terms of the distinction between ionizing and recombining phase plasmas. Additionally, a method is presented for inferring the unknown neutral gas pressure in the discharge tube from the time-dependent visible and infrared emission measured by a simple photodiode placed near the antenna. In magnetized discharges created with fast gas injection, the downstream ion density rose by Δni∼1018 m−3 in the first ∼100 μs after the RF power was turned off. The conditions conducive to this afterglow density rise are investigated in detail, and the effect is tentatively attributed to pooling ionization.

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“…In recent years, there has been a lot of interest in the effects of small amounts of hydrogen added to argon discharges (see, e.g., [1] and references therein). The addition of hydrogen was found to cause a drop in the ionization in the discharge, and in the Ar ion and electron densities.…”

Section: Introductionmentioning

confidence: 99%