Hydrodynamic Analysis of the Thickness Variation in a Solid Film Formed by a Spin Coating Process

Abstract

The surface profile of the film formed by spin coating is experimentally investigated in this paper. The unavoidable wavy form at the surface was observed when the ultraviolet curable resin was used. In addition, the surface thickness variation was directly related to the viscosity, disk rotation speed, and disk size. Fluid dynamic theory with non-dimensional analysis was conducted to describe the surface profile after the spin coating process. It was found that the film had been thickened until the viscosity force and Coriolis force were balanced. The Coriolis force, however, also affected the flow instability during the spinning of the disk. The film thickness variation is successfully described by using the non-dimensional factors. In addition, the edge bump which is induced by hydraulic jump is expressed by the relation of power law of Ekman, Weber, and Reynolds numbers. In this paper, the thickness variation and edge bump position are expressed by using hydrodynamic theory. It is also reveals that the Coriolis force acts based on the magnitude of thickness variation, and the surface tension affects the edge bump position. The presented relationships will contribute further understanding of the spin coating process. The outcome of this paper supports the cost-effective productions of electronic microcircuits and solar cells.