Hybrid wedge plate-grating interferometer for collimation testing

Darlin, J. S.; Kothiyal, M. P.; Sirohi, R. S.

doi:10.1117/1.601672

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2001

2002

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Cited by 3 publications

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“…Because of high precision measurement to be realized for micro/nano-technology, some optical measurement systems have been proposed and reported [1][2] . In optical measurement system, collimation beam is indispensable as basic element.…”

Section: Introductionmentioning

confidence: 99%

Automatic collimation system by Talbot interferometry

et al. 2001

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This study concerns the automatic high precision beam collimation system using the Talbot interferometry. When the collimation beam is obtained placed point-source of light in focal position of the collimation lens, the defocus value is calculated from a moire fringe width in the Talbot interferometry using only two grating. With the advance of collimation, the moire fringe cannot be confirmed. Using the movement of moire fringe when one of grating shifts, the expanded moire fringe width is measured highprecisely from the phase difference of intensity change of two detecting points, using peak position of the cross-correlation coefficient. With the result of the defocus value, the collimator lens is positioned by motor controller.

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Section: Introductionmentioning

confidence: 99%