2023 24th European Microelectronics and Packaging Conference &Amp; Exhibition (EMPC) 2023
DOI: 10.23919/empc55870.2023.10418392
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Hybrid Lithography Fabrication of Single Mode Optics for Signal Redistribution and Coupling

David Weyers,
Krszystof Nieweglowski,
Karlheinz Bock
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