Hybrid holographic microscope for interferometric measurement of microstructures

Xu, Lei; Peng, Xiaoyuan; Asundi, Anand; Miao, Jianmin

doi:10.1117/1.1412621

Cited by 18 publications

(11 citation statements)

References 15 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…DH can be applied as an inspection tool to measure a topographic profile with the interferometric resolution of MEMS surfaces, or to study the deformations through the holographic interferometry. [2][3][4][5][6] In practice, we adopted DH as a method to determine with high accuracy out-of-plane deformations due to the residual stress introduced by fabrication process. MEMS with diverse shapes and dimensions and made with different technologies have been characterized.…”

Section: Introductionmentioning

confidence: 99%

Digital holography microscope as tool for microelectromechanical systems characterization and design

Coppola

Iodice

Fińizio

et al. 2005

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

Microelectromechanical systems (MEMS) are integrated microdevices or systems combining electrical and mechanical components that can sense, control, and actuate on the microscale and function individually or in arrays to generate effects on the macroscale. MEMS is one of the most promising areas in future computers and machinery, the next logical step in the silicon revolution. Fabricated using integrated circuit (IC)-compatible batch-processing technologies, the small size of MEMS opens a new line of exciting applications, including aerospace, automotive, biological, medical, fluidics, military, optics, and many other areas. We explore the potentialities of a high-resolution optical technique for characterizing MEMS microstructures. The method is based on the application of digital holography as a noncontact metrological tool for inspection and characterization of the microstructure surface morphology. The microstructures under investigation are homogeneous and bimorph polysilicon cantilevers; both structures exhibit an out-of-plane deformation owing to residual stress. The high sensitivity of the proposed method enables us to precisely determine the structure morphology and calculate the intrinsic stress and bending moment, in good agreement with an analytical model. Hence, the proposed technique can be exploited to assess the fabrication process and the functionality as well as the reliability of micromachined structures. Moreover, it is also used as a tuning tool for design and finite-element-based simulation software.

show abstract

Section: Introductionmentioning

confidence: 99%

Digital holography microscope as tool for microelectromechanical systems characterization and design

Coppola

Iodice

Fińizio

et al. 2005

J. Micro/Nanolith. MEMS MOEMS

View full text Add to dashboard Cite

show abstract

“…In case of objects with diffusely reflecting surfaces, since the microscopic objective has short working distance at higher magnification, illuminating the object is a problem. To ensure sufficient working distance for good illumination of objects, integration of long distance microscope (LDM) with a digital holographic system has been proposed [90,110]. The experimental set-up is shown in Figure 2.19.…”

Section: System Development Based Of In-line Geometrymentioning

confidence: 99%

“…Hybrid in-line holographic microscope is presented for interferometric measurements of microstructures [90]. The system is called in-line digital micro-holo-interferometry (IDMHI).…”

Section: Particles Imagingmentioning

confidence: 99%

“…Microelectromechanical systems (MEMS) demands sensitive and robust interferometric techniques. Integration of principle the digital holography interferometry with microscopy, called hybrid holographic micro interferometry provides a novel solution for measurements of microsystems[64,[89][90][91][92][93].…”

mentioning

confidence: 99%

“…19. Hybrid holographic microscope set-up[90] • Transmission set-up An in-line digital holography set-up for particle distribution measurement in transparent media is shown inFigure 2.20. A collimated laser beam illuminates the particles field[111].…”

mentioning

confidence: 99%

See 2 more Smart Citations

Lensless in-line digital holography for dynamic applications

Singh¹

View full text Add to dashboard Cite

for spending their precious time with me and for the valuable tips. I am thankful to technicians of Photonics and Microsciences lab Mr. Koh Hai Tong and Grace Ho and all technicians of Micromachine lab for their helping attitude and support throughout the work. I would like to thank to NTU and SPIE of USA for providing the financial supports for presenting my research works in international conferences. I am also thankful to Ngee Ann AEM Centre of Innovation (NACOI) for providing the opportunity as industrial attachment student. I would like to express my gratitude to all my family members, specially my parents and my wife for their constant encouragement. Its my pleasure to express thanks to all my friends in NTU for the useful discussion and excellent company. Finally, I would like to acknowledge the financial support that I received from NTU during my studies in Singapore. i

show abstract

Digital Holography: Recent Advancements and Prospective Improvements for Applications in Microscopy

Ferraro

Nicola

Coppola

2006

Advanced Sciences and Technologies for Security Applications

View full text Add to dashboard Cite

Hybrid holographic microscope for interferometric measurement of microstructures

Cited by 18 publications

References 15 publications

Digital holography microscope as tool for microelectromechanical systems characterization and design

Digital holography microscope as tool for microelectromechanical systems characterization and design

Lensless in-line digital holography for dynamic applications

Digital Holography: Recent Advancements and Prospective Improvements for Applications in Microscopy

Contact Info

Product

Resources

About