Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties

Luo, Quanshun; Yang, Shicai; Cooke, Kevin

doi:10.1016/j.surfcoat.2013.07.003

Cited by 82 publications

(33 citation statements)

References 51 publications

(77 reference statements)

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“…45 HIPIMS/DCMS co-sputtering has also been investigated for obtaining a higher ionization degree of sputtered species without significant loss of deposition rate. 46,47,48 In Sec. II, we discuss the results of energy-analyzed mass spectrometry measurements performed to determine ion-energy distribution functions (IEDFs) at the substrate position for Al and Ti targets operated in HIPIMS and DCMS.…”

Section: Introductionmentioning

confidence: 99%

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

Greczyński

Jensen

et al. 2014

Surface and Coatings Technology

145

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We review results on the growth of metastable Ti1-xAlxN alloy films by hybrid high-power pulsed and dc magnetron co-sputtering (HIPIMS/DCMS) using the time domain to apply substrate bias either in synchronous with the entire HIPIMS pulse or just the metal-rich portion of the pulse in mixed Ar/N2 discharges. Depending upon which elemental target, Ti or Al, is powered by HIPIMS, distinctly different film-growth kinetic pathways are observed due to charge and mass differences in the metal-ion fluxes incident at the growth surface. Al + ion irradiation during Al-HIPIMS/Ti-DCMS at 500 C, with a negative substrate bias Vs = 60 V synchronized to the HIPIMS pulse (thus suppressing Ar + ion irradiation due to DCMS), leads to single-phase NaCl-structure Ti1-xAlxN films (x ≤ 0.60) with high hardness (> 30 GPa with x > 0.55) and low stress (0.2-0.8 GPa compressive). Ar + ion bombardment can be further suppressed in favor of predominantly Al + ion irradiation by synchronizing the substrate bias to only the metal-ion-rich portion of the Al-HIPIMS pulse. In distinct contrast, Ti-HIPIMS/Al-DCMS Ti1-xAlxN layers grown with Ti + /Ti 2+ metal ion irradiation and the same HIPIMS-synchronized Vs value, are two-phase mixtures, NaCl-structure Ti1-xAlxN plus wurtzite AlN, exhibiting low hardness (≃18 GPa) with high compressive stresses, up to -3.5 GPa. In both cases, film

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Section: Introductionmentioning

confidence: 99%

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

Greczyński

Jensen

et al. 2014

Surface and Coatings Technology

145

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“…Details of the structural characterization and mechanical properties of the sample coating can be found elsewhere [26]. In brief, the coating was 2.56 µm thick, exhibiting a single-phase cubic crystalline structure with a strong {220} texture and hardness of HK 0.025 34.8 ± 3.8 GPa.…”

Section: The Sample Materialsmentioning

confidence: 99%

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Luo

Yang

2017

Coatings

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Abstract:Residual stresses of physical vapor deposition (PVD) hard coatings can be measured using X-ray diffraction (XRD) methods under either conventional d-sin 2 ψ mode or glancing incident (GIXRD) mode, in which substantial uncertainties exist depending on the applied diffraction parameters. This paper reports systematic research on the effect of the two analytical modes, as well as the anisotropic elastic modulus, on the measured residual stress values. A magnetron sputtered TiN grown on hardened tool steel was employed as the sample coating, to measure its residual stress using various diffraction peaks from {111} to {422} acquired at a range of incident glancing angles from 2 • to 35 • . The results were interpreted in terms of the effective X-ray penetration depth, which has been found to be determined predominantly by the incident glancing angle. In the d-sin 2 ψ mode, the results present an approximate residual stress over a depth of effective X-ray penetration, and it is recommended to use a diffraction peak of high-index lattice plane from {311} to {422}. The GIXRD mode helps determine a depth profile of residual stress, since the measured residual stress depends strongly on the X-ray penetration. In addition, the anisotropy of elastic modulus shows limited influence on the calculated residual stress value.

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“…Fig. 1 shows a schematic section of the configuration, which could be operated either as a conventional multimagnetron close-field unbalanced magnetron sputtering ion plating (CFUBMSIP) system or without any magnetrons [34,38] . The substrate turntable has a diameter of 350 mm with single fold rotation.…”

Section: The High Power Pulsed Glow Discharge Plasma Nitriding Processmentioning

confidence: 99%

“…The wear resistance of the processed samples was evaluated using a self-developed pin-on-disc tribo-meter [34,38,40] .In the tests, two counterpart materials were used, including 5.0 mm diameter balls made from hardened Cr-alloyed ball bearing steel and WC-8%Co cemented carbide. The wear tests were conducted under an applied normal load of 5 N and linear sliding speed of 0.2 ms -1 , with each test being run for 60 minutes.…”

Section: Hardness and Tribological Testingmentioning

confidence: 99%

Effect of Nitriding Time on the Structural Evolution and Properties of Austenitic Stainless Steel Nitrided Using High Power Pulsed DC Glow Discharge Ar/N2 Plasma

Yang

Kitchen

Luo

et al. 2016

J. Coat. Sci. Technol.

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A high power pulsed DC glow discharge plasma (HPPGDP) system was employed to perform fast nitriding of AISI 316 austenitic stainless steel in Ar and N2 atmosphere. In-situ optical emission spectroscopy and Infrared pyrometer measurements were used during the plasma nitriding to investigate the effect of dynamic plasma on the nitriding behaviour. SEM and EDX, XRD, Knoop indentation, and tribo-tests were used to characterize microstructures and properties of the nitrided austenitic stainless steel samples.HPPGDP produced high ionization of both Ar and N2in the plasma that corresponded to dense ion bombardment on the biases steel samples to induce effective plasma surface heating and to form high nitrogen concentration on the biased steel surfaces, and therefore fast nitriding (> 10µm/hour) was achieved. Various phases were identified on the nitrided stainless steel samples formed from a predominantly a single phase of nitrogen supersaturated austenite toa multi-phase structure comprising chromium nitride, iron nitride and ferrite dependent on the nitriding time. All the nitrided AISI 316 austenitic stainless steel samples were evaluated with high hardness (up to 17.3 GPa) and exceptional wear resistance sliding to against hardened steel balls and tungsten carbide balls.

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Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties

Cited by 82 publications

References 51 publications

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

A review of metal-ion-flux-controlled growth of metastable TiAlN by HIPIMS/DCMS co-sputtering

Uncertainty of the X-ray Diffraction (XRD) sin2 ψ Technique in Measuring Residual Stresses of Physical Vapor Deposition (PVD) Hard Coatings

Effect of Nitriding Time on the Structural Evolution and Properties of Austenitic Stainless Steel Nitrided Using High Power Pulsed DC Glow Discharge Ar/N2 Plasma

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