Abstract:This work demonstrates a humidity sensor based on two multi-layered graphene (MLG) strips monolithically integrated onto a micro-hotplate (MHP). A transfer-free approach was adopted to release the graphene from the catalyst to reduce device variations and ensure scalability. The sensing performance of the device was tested by exposing the device to humidity levels in the range of 10% to 84% of relative humidity (RH). Both MLG strips present a linear response over this range. The micro-heater implementation is … Show more
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